【作者】 徐振浩；

【导师】 计时鸣； 张利；

【作者基本信息】 浙江工业大学 ， 机械电子工程， 2010， 硕士

【摘要】 CVD金刚石是金刚石材料未来发展的主流,其超精密加工则是扩大CVD金刚石薄膜应用的关键技术之一。本文研究了一种高效的抛光方法——基于触媒原理的CVD金刚石抛光方法(简称触媒法抛光)。该方法以金刚石石墨化原理为基础,在加工过程中充分利用铁(Fe)、镍(Ni)、钴(Co)等过渡金属对金刚石的触媒作用,有效地降低金刚石石墨化所需要的活化能,形成易于研磨的石墨和无定形碳,通过机械研磨以及碳原子的在金属中扩散和在空气中的氧化来提高材料的去除效率。本文的主要工作和成果有以下几方面:1.采用基于触媒作用的CVD金刚石膜“软硬兼施”的石墨化加工思想,有效地利用了过渡金属对金刚石的催化作用。2.研究了一种适用于CVD金刚石薄膜研磨和抛光,具有结构紧凑,加工效率和加工精度高,负面影响小,使用便捷等特点的抛光加工系统。3.通过化学热力学和动力学的研究以及试验分析,论证了过渡金属对CVD金刚石的触媒作用,在常温条件下实现了石墨化反应。4.通过正交分析法的研究表明,触媒抛光法各试验控制因素与CVD金刚石加工质量成正比,其中时间t的影响最大,速度v的次之,而负载f的影响最小。5.通过试验研究表明,触媒抛光是一种高效的抛光方法,在相同的加工条件下,其加工质量明显优于传统的机械抛光法。更多还原

【Abstract】 CVD diamond is the mainstream of future development of diamond materials, and its ultra-precision machining is one of the key technologies to expand the application of CVD diamond films. This paper presents an efficient method of diamond polishing- accelerant polishing of CVD diamond. This method based on the principle of diamond graphitization, which make full use of Fe, Ni, Co and other transition metals as catalysts for diamond, effective in reducing the activation energy of diamond graphitization, produce easy-to-ground graphite, then improve the processing efficiency by mechanical polishing, Carbon spread in metal and air oxidation.The main results and work in this paper as the following aspects:1. Introduce the idea of polishing based on the principle of diamond graphitization, and make full use of Fe, Ni and other transition metals as catalysts for diamond.2. Research a polishing system suitable for CVD diamond polishing and grinding, which have the features as compact frame, high processing efficiency and precision, and easy to use.3. By studies and experimental analysis of chemical thermodynamics and kinetics, it shows the catalytic role of CVD diamond by transition metal, and achieve the diamond graphitization at room temperature.4. Though the research of Orthogonal Experimental Analysis, it shows the control factors of accelerant polishing is proportional to processing quality of CVD diamond, whish polishing time is the biggest influencing factors, second is polishing the speed, and the load has little impact5. Experimental studies show that accelerant polishing is a highly efficient polishing method, under the same processing conditions, its processing quality is significantly better than the traditional mechanical polishing.更多还原