【作者】 倪坤；

【导师】 史国权；

【作者基本信息】 长春理工大学 ， 机械制造及其自动化， 2011， 硕士

【摘要】 衍射光栅是一种精密的光学元件,广泛地应用于各种现代光谱分析、精密测量中。利用金刚石刻划刀在膜层上机械刻划衍射光栅,是一种不可替代的光栅制作方法。因此,开展衍射光栅机械刻划理论及槽形控制技术研究是非常必要的。针对金刚石弧形刻刀刻划衍射光栅的过程,本文建立了等效下压速度模型；根据滑移线场理论,建立了光栅机械刻划过程的刻划深度模型,为铝膜蒸镀及刻刀定位提供理论指导依据。在压痕、划痕试验的基础上,测得铝膜属性,建立了光栅刻划的有限元模型；采用Deform-3D有限元分析软件,对光栅槽形形成过程进行了模拟仿真,分析了刻划参数、刀具参数对光栅槽形形成的影响规律。采用正交试验方法,优化刻划参数、刀具参数,分析了铝膜材料流动规律以及刻划载荷,提出了光栅槽形形成的控制策略。最后,本文还根据金刚石刻划刀的磨损情况,进行了刀具金刚石定向设计,为大面积衍射光栅刻划提供了长寿命刀具。更多还原

【Abstract】 Diffraction grating is a precision optical element, widely used in various modern spectral analysis, precision measurement. The mechanically ruled grating in the film by the diamond graver is one unreplaceable manufacture method of diffraction grating. Therefore, it is very necessary to carry out theory research of the mechanically ruled diffraction grating and control technology of the grating groove.According to the course of the mechanically ruled grating by the circular graver, this paper establishes the model of equivalent indentation speed. Based on slip-line field theory, the mathematical model of ruled depth is established.it provides the theory basis for the aluminum membrane evaporation and the graver orientation.Based on measured the aluminum film properties by the indentation test and scratch test, the paper has established the finite element model of ruled grating. The forming process of grating grooved has been simulated by the finite element analysis software Deform-3D, The influence rule of the scoring parameter and graver parameter to the forming process of grating groove are analyzed.Using the orthogonal test method, the scoring parameter and graver parameter have been optimized. The aluminum membrane material mobile rule has been analyzed, Scoring load has obtained. Control strategy has been proposed about the forming process of grating groove.Finally, According to diamond graver wear condition, the orientation of diamond graver is designed, which provides long life graver for big area diffraction grating.更多还原