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宽光谱监控电子束蒸发薄膜制备系统的研制与应用
【作者】 陆卫杰；
【导师】 张荣君；
【作者基本信息】 复旦大学 ， 光学， 2011， 硕士
【摘要】 光学薄膜材料在人们的生活中变得日趋重要。光学薄膜的制备技术在近几十年来得到不断发展,而如何对薄膜的制备过程进行实时监测,以及如何通过监测干预制备过程使过程得到有序的控制,一直是人们所关注的课题。光学实时监控利用光学方法实时监控薄膜的制备过程,因其快速而不会伤害薄膜的特性而受到重视。宽光谱监控通过在一定的波长范围内实时测量和分析薄膜的特征光谱,在薄膜的生长过程中实时跟踪薄膜的各种光学特性的变化过程。它突破了传统的石英晶振监控和单波长监控其测量方法的单一性和局限性,并且能够根据所需的光学特性更有效地制备高质量、高性能的光学薄膜。宽光谱实时监控的研究对薄膜制备的发展具有重要意义。本论文设计并实现了基于真空电子束蒸发的实时宽光谱监控薄膜制备系统。由于从实用性、通用性和可扩展性的角度设计了此系统,并使用新型近红外集成多光栅线阵/面阵CCD探测器式光谱仪和近红外宽光谱光源对薄膜制备过程进行监控,它不仅支持宽光谱监控自动生长薄膜材料,也兼容单波长监控自动生长薄膜材料,同时也能适应新的监控方法。在此基础上,论文研究了宽光谱监控涉及的各种光谱分析算法,包括各种噪声过滤算法和薄膜生长进度分析算法,分析了这些算法的可行性和有效性。为了验证系统的可靠性和各宽光谱监控算法的可行性,使用此宽光谱监控薄膜制备系统制备了λ/4膜系的薄膜。最后,使用Z扫描测量技术测量了用SiOx/SiO2超晶格制备方法制备的尺寸可控的硅纳米晶的非线性光学性质,分析了量子限制效应对于硅纳米晶的非线性光学性质的影响。
【Abstract】 Optical thin films have been playing a more and more important role in the daily life of the humankind. As a result, the manufacturing technology of optical thin films has rapidly evolved in the past few decades. One of the most significant contributions to the evolvement is the development of in-situ optical monitoring technologies. Broadband optical monitoring features in-situ measurement of the transmittance or reflectance of the optical thin film being prepared in a wide spectral range. It allows online spectral analysis and real-time tracing of various optical properties of the target sample, which are both significant advantages compared to traditionally methods such as the turning point method.In this thesis, a broadband optical monitoring (BOM) system has been designed and constructed for an electron beam evaporation system. It features in-situ monitoring of the transmittance spectrum of the target sample and automatic feedback control of the electron beam evaporation system. Due to its modular structure, the BOM system is very extensive and can be adapted to new monitoring methods. Several algorithms of spectral analysis have been implemented for the BOM system to trace the deposition progress of the target sample. And quarter-wave structures have been prepared using the BOM system to verify its capabilities. In addition, the nonlinear optical properties of Si nanocrystals prepared using a SiOx/SiO2 superlattice approach has been investigated.