【作者】 张凤军；

【导师】 周素梅；

【作者基本信息】 西南大学 ， 光学， 2011， 硕士

【摘要】 近年来,平面微透镜阵列的制作技术日益成熟,特别是光刻离子交换工艺.由这种方法制作的微透镜掩埋在平面的玻璃基片表面以下,不仅光学性能均匀性好,而且阵列排列整齐具有较好的聚光、成像、准直、分路、变折等功能；同时由于单元透镜直径小,密度高,可实现信息的大容量、多通道并行处理。本文着重对平面微透镜阵列的设计、制作工艺、性能测试进行研究,采用光刻离子交换在特制的玻璃基片上制备出新型的平面微透镜阵列——方形孔径平面微透镜阵列。通过对离子交换制作技术进行完善,对设计模型及工艺参数进一步优化,使微透镜阵列的光学性能进一步增强,填充因子和聚光效率提高到较为理想的值；这种平面微透镜阵列在提高探测器的灵敏度以及其它微光学成像系统、光学处理器等方面将得到广阔的应用。在理论上,本文以点源扩散作为理论基础,分析了离子热扩散的规律,得出以点源扩散为模型的掩埋式平面微透镜的折射率是以离子交换窗口为中心的对称分布。基于此模型,实验室提出了新型的方形孔径平面微透镜阵列,设计了其理论的模板,同时探讨了方形孔径平面微透镜阵列的光学特性和成像特性。在实验上,通过多次实验测量选择了合适的离子交换温度、熔盐比例、祛钛工艺并进行了模板参数的优化,并成功制备了窗口宽为0.2mm,中心距为0.8mm的微透镜阵列；并通过微小光学测试系统,较准确的测量了样品的光学性能(如折射率分布、截距、数值孔径等),其填充系数可达95%以上。测量结果显示该透镜阵列的抗压抗高温能力强,像差较小,成像质量均匀。对微透镜阵列结构进行深入研究的过程中,本文还发现了微透镜阵列对微图形的放大效应——莫尔条纹。对微透镜阵列结构参数、微图形结构参数与微图形阵列移动速度、移动方向以及放大倍率几者之间进行分析,并利用微透镜阵列实现了对微图形放大、动态、立体的显示。更多还原

【Abstract】 Recently, as the fabrication of planar microlens with the techniques of lithographic ion-exchange array become more mature, the optical properties of microlens array which buried in the glass substrate is uniformity and unit lens are arranged very well. This type of planar microlens array has many functions such as focusing, imaging, collimation, shunting, index changing and so on. Meanwhile, the capacity of large information storage and the multi channel parallel may be come true with the unit lens which is small enough in diameter and high density. In this paper, we placed emphasis upon to the designing of planar microlens array and the fabrication technology at first. Therefore, we focused on the investigation of the planar microlens array design, production process and performance testing in this paper. From this work, a new type of square aperture planar microlens array was designed and fabricated successfully to achieve the fill factor optimization., and the optical properties of microlens array are further enhanced with improvement of ion-exchange technology and optimization of model design and experimental parameters. So, the fill factor and the photospot efficiency will be improved to an ideal value and this planar microlens array realize a broad application in improving detection the sensitivity, other micro-optical imaging systems and optical processors, etc.In theory, we analyzed the law of ion thermal diffusion of square aperture planar microlens array with method of point source and obtained the index distribution curves which was centrosymmetry from the center of microlens unit to the brink. With this work, we discussed the optical performance of the imaging quality with square-aperture planar microlens arrays.With several experimental steps, we put the substrate into the mixed molten salt with a certain proportion to exchange ion on the glass substrate at different temperature and corroded the 1.0 micron layer of titanium film on the substrate with an appropriate process. Based on the windows width of the sample is 0.2mm and the center distance between adjacency list was 0.8mm, the optical performance parameters (such as refractive index distribution, intercept, number aperture and so on) of sample have been carried on with a more accurate survey by the CCD imaging system and Jas Ming interferometer. However, we got a more satisfactory result that the fill-factor of square aperture planar microlens array is more than 98% and the imaging distortion is very small.With further research on the microlens array, square aperture planar microlens array had the amplification effect on micrograph whose unit size is approximate to the parameters of microlens array. Based on the principle of Moire fringe, we investigated the parameters of micro-structure, velocity and direction of movement, magnification with the micro-graphic array. Therefore, amplification of micrograph,3-dimension dynamic display would be available.更多还原