【作者】 莫勇涛；

【导师】 杨景常；

【作者基本信息】 西华大学 ， 信号与信息处理， 2011， 硕士

【摘要】 随着半导体制造工艺和技术的高速发展,电力电子系统的应用领域越来越广泛,电子设备的种类也越来越多,电子设备已经是人们的工作、生活中必不可少的工具。任何电子设备都离不开可靠的电源,为了使电子设备安全、稳定和可靠的工作,必然会对它们的电源提出越来越高的要求。现代社会中,由于工作需要必然会对某些工具的硬度有一定的要求,为了满足这个要求,在产品的生产过程中,往往需要对这些产品进行表面镀膜,以增强其耐磨性和耐刮性:譬如日常生活中的自行车车圈和金属器皿等等。在物理化学领域,这属于表面处理改性,需要使某种气体在一个密封的近似真空环境的炉体里进行强电场等离子体电离,使这些等离子体沉积在基件表面形成一层致密的薄膜。只有在真空炉的两个电极施加一定频率的脉冲电压形成等离子体相对而言容易些,而这又需要一个高频脉冲电源。本论文所研制的高频脉冲电源完全可以满足这种需要。为了能够提供大功率的输出,本文所设计的用IGBT作为功率器件的高频脉冲电源采用三相工频交流电电源输入,经过接触器、三相调压模块调压,经过三相整流滤波,通过全桥逆变和高频变压器升压;再次经过高压整流,直流斩波,最终按要求输出所需结果。控制电路采用脉宽调制PWM来控制,使电源设备输出所需要的高频脉冲波。经过理论验证、设计原理图和整套设备调试,基本完成设计要求。更多还原

【Abstract】 With the rapid development of semiconductor technology, power electronics systems are used more and more widely, and the types of electronic system are growing larger. Electric devices have been essential tools for people’s living and working. Any electric device cannot work without reliable power supply. For making the electric devices working safety, stable and reliable, the requirement to the power supply is more and more strictly. Nowadays, some work has a certain requirement to the hardness of tools. In order to satisfy this requirement, during the process of industrial production, some products need surface deposition in order to increase their abrading resistance and scraping resistance -- Such as bicycle rime and metal vessels. In the domain of physics and chemistry, it is named surface property changing; some gases are at the state of plasma ionization under high electronic force in the vacuum stove, at certain air force and vacuum degree, so the produce in the vacuum stove is on the state of surface plasma ionization. The voltage force at a certain frequency, which is generated from a high frequency pulse supply, is enforced to the two electrodes of the vacuum stove. The high frequency pulse power supply which was researched and designed in the article meets the requirement. In order to provide high power output, the high frequency pulse power supply designed in this article is using IGBT as power device, and the input of this power supply is three phase 50Hz alternating current which is rectified by the three phase SCR and filtered by the large scale capacitors, and then it was inverted by means of full bridge and the voltage is boosted by the high frequency transformer. PWM is adopted in the control circuit, so the high frequency rectangular wave which the device needed can be got. After a theoretical validation, schematic design, and full set of equipment commissioning, and the design requirements are basically complete.更多还原