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半导体纳米材料制备与性能研究

Preparation and Properties of Semiconductor Nanomaterials

【作者】 田鸣

【导师】 权善玉;

【作者基本信息】 沈阳工业大学 , 凝聚态物理, 2010, 硕士

【摘要】 半导体纳米材料因其独特性质和各种量子效应,使得其在各种功能器件的应用中发挥着重要作用,对未来社会信息化的发展也有着至关重要的影响。本文叙述了两种半导体纳米材料的制备过程、表征和相关光学性能的测试。第一,利用模板法制备AlN纳米线宏观阵列的过程。首先利用自主装生长出单层有序的PS球模板;然后利用蒸发法在PS球模板上制备出单分散Al纳米颗粒模板。通过扫描电子显微镜观察,对不同实验条件下所制备出的PS球模板和Al纳米颗粒模板进行形貌表征,从而提出了一套制备单分散金属纳米颗粒模板的最有效方法;采用模板法,在温度1100℃,恒温时间240min, N2气600torr条件下,制备出取向规律,且直径均匀、可控的AlN纳米线宏观阵列。第二,利用溶胶凝胶法制备ZnO薄膜的过程。以二水合醋酸锌颗粒做为原料,乙二醇甲醚做为溶剂,乙醇胺作为稳定剂,按照一定的摩尔比配成溶液;在60℃水浴中充分搅拌制成溶胶;采用离心匀胶机旋涂2-3min后成ZnO薄膜;再将上述薄膜放入快速升温管式炉内,在300℃下烧结10min,自然冷却最终成膜。本论文主要研究采用不同旋涂转速对所制备薄膜的结构、光学性质的影响。采用X射线衍射仪分析薄膜样品晶相结构,结果表明用此法制备的ZnO薄膜具有c轴择优取向,且随旋涂转速的增大,(100)和(101)晶面族的衍射峰逐渐消失,(002)衍射峰增强且宽化,说明旋涂转速对薄膜的晶向成长有一定的影响。利用紫外-可见光分光光度计测试ZnO薄膜的透射光谱,研究表明该法制得的ZnO薄膜具有很好的透光性,透光率高达92%,并利用吸收系数与禁带宽度的关系计算了薄膜的禁带宽度,结果显示ZnO薄膜的光学带隙随着旋涂转速升高而增大,表明旋涂转速可以在一定范围内实现对ZnO薄膜光禁带的可调。

【Abstract】 Because semiconductor nanomaterials’unique nature and quantum effect, it plays the influential role in many of functional devices, and it also have the very important influence to the development of future society.This article reported preparation process of two semiconductor nanomaterials, characterization and the optical performance test:First, preparation of AlN nanowires array studied by template method. Using self-loading to prepare orderly arrangement of PS template; then Al nanoparticles template is prepared on the PS template. In the results of different experimental condition, observing PS and Al nanoparticles template by SEM, the most efficacious method of preparation Al nanoparticles template can be confirmed; AlN nanowires array can be prepared under the best condition.The condition is 1100℃, constant time 240min, and 600torr.Second, preparation processes of ZnO thin films studied by sol-gel. C4H6O4Zn’2(H2O) is raw material, CH3OCH2CH2OH is solvent, H2NCH2CH2OH is a stabilizer, the solution were madeup according to a certain mol ratio, stiring in 60℃water bath; the ZnO thin films is synthesized using a centrifugal spin coating machine; then the film is put into the rapid heating furnace, set 10min and 300℃, natural cooling into the final films. In this thesis, different speed is researched on the structure of films, optical properties. X-ray analysis can analyse the crystalline structure of thin film samples, the results show that ZnO thin films prepared by this method has the c-axis preferred orientation, and with the spin speed increases, the (100) and (101) diffraction peak gradually disappeared, (002) diffraction peak is enhanced and broadened, account for spin-coating speed have a certain impact on the growth of crystal films. Transmitted spectrum of ZnO thin films was test by ultraviolet-visible spectrophotometer, showing that ZnO thin films has good transparency, light transmitted rate of up to 92%, and using the absorption coefficient and relationship calculates band gap of the film. With the increase of spin speed, the optical band gap increased, and the band gap of ZnO Films is adjustable.

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