【作者】 赵晓霞；

【导师】 高大启； 李建华；

【作者基本信息】 华东理工大学 ， 计算机应用技术， 2011， 硕士

【摘要】 随着微机电系统(Micro Electronic Mechanical System, MEMS)的发展,MEMS器件结构日益复杂,通常需要多次设计精化才能达到性能最优。精化设计过程中,对MEMS器件的工艺掩模或几何模型进行手动修改,常常导致几何模型内部的不一致以及几何模型与工艺掩模不一致等问题。针对精化过程中模型的不一致问题,本文提出一种面向精化的表面微加工MEMS工艺和几何建模方法。该方法首先建立三维模型和工艺模型关联关系；当用户对二维掩模进行精化设计时,根据变动依赖关系通过直接变动映射到或局部几何建模的方式更新所影响的局部三维几何模型；在对三维几何模型进行精化变动设计时,用户仅需对设计关注层进行修改,然后,通过变动传播和变动映射实现三维实体中各工艺层的一致性变动和同步掩模更新,达到满足可制造性的器件模型优化和掩模更新的目的。采用该方法进行表面微加工MEMS器件的设计精化,由于保存了原有模型中的大量可用信息,仅仅进行局部模型的变动,因此可以实现实时的变动输入和响应,有利于加速MEMS器件的精化设计,从而缩短器件的开发周期。基于以上研究成果,论文实现一个面向精化的表面微加工MEMS几何和工艺建模原型系统,并以微传感器的设计为例进行测试,验证本文的学术思想与原型系统的正确性。更多还原

【Abstract】 With the rapid development of MEMS(Micro Electronic Mechanical System) technology, the structure of MEMS devices is becoming increasingly complex, thus repeated design optimization is always needed to achieve optimal performance. In the refinement process, manually modification of MEMS geometry model or the craft masks usually causes problems like geometry model internal inconsistencies and masks not consistent with the geometry model.In order to solve the problems in manual variation of MEMS refinement, a method of refinement-oriented geometrical and process modeling of the surface micro-processed MEMS devices is proposed. In this method, the relationship between geometry model and process model is established firstly; When the designer refine a craft mask, the local 3D geometrical model influenced will be updated through direct modification mapping or local geometrical modeling according to the dependent relationship; As to design refinement of the geometry model, the designer only need to modify the concerned layer of the 3D geometry model; then all the associated elements will be updated in the 3D geometry model and the masks simultaneously through variation propagation and variation mapping. In the method, the device model can be optimized and maintained with manufacturability. Because most of the available information in the original model were preserved, only a partial model changed, therefore this method can realize real-time modification input and response, and is advantageous to the acceleration of MEMS devices design refinement process, so as to shorten the development cycle.Based on the above research achievements, the paper implements a prototype system of refinement-oriented geometrical and process modeling for surface micromachined MEMS. To verify the correctness of the academic idea of the paper and the prototype system, some tests are given.更多还原