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基于MEMS的地震检波器研究与设计

The Research and Design of MEMS-Based Earthquake Detector

【作者】 刘丽娟

【导师】 李欣;

【作者基本信息】 中国海洋大学 , 通信与信息系统, 2010, 硕士

【摘要】 由于地震勘探提出高分辨率、高保真度等要求,多年来国内外许多技术公司和研究机构一直在探索和寻找新的地震信号检测技术的设备,并进行了许多试验,推出了一些利用如压电陶瓷、涡流、激光等原理的试验产品,但在上述的关键技术性能上始终没有重大突破。基于MEMS加速度传感器的地震检波器在频带、动态范围和轴向抗干扰性等性能指标上优于传统动圈式检波器。针对高分辨率、高保真、高精度地震勘探这一应用需求,需要进一步提高MEMS加速度传感器的性能。因此,本论文选择了MEMS电容加速度型传感器。本论文工作安排如下:首先,介绍了MEMS传感器和地震检波器的国内外研究现状和发展前景,提出了本课题的研究内容和研究意义;其次,简要说明了地震检波器的分类方式,主要介绍了常规检波器、超级检波器、数字检波器的结构和性能特点以及地震检波器的选用原则;然后,系统设计,其内容主要有:MEMS加速度计的工作原理和结构模型,推导出加速度计的输入与输出之间的比例关系,单片机的种类和选用原则,本论文所选择的主要器件及其技术参数和特点。之后详细设计了系统的电路原理图,对三路AD采样与单片机之间的通信,利用了CPLD芯片EPM7032S,扩展I/O口,通过对EPM7032S对其编程以达到8分频器的作用,对三路AD进行片选。另外,利用MAX485转换芯片进行单片机和PC机串口通信的电平转换。设计出了三路AD、EPM7032S和单片机三者的原理图、单片机和外部RAM的原理图,并给出了定时器中断框图、AD中断框图、和串口发送接收框图,并对检波器的动态范围进行了详细分析。最后,进行全文总结和展望,指出了下一步的工作。

【Abstract】 As the proposed high-resolution seismic exploration, high-fidelity, etc. over the years many domestic and foreign technology companies and research institutions have been exploring and finding new seismic signal detection devices, and conducted many tests, such as the introduction of some use pressure ceramics, eddy current, laser and other principles of test products, but the key technology in the performance never a major breakthrough.Acceleration Sensor Based on MEMS geophones in the band, dynamic range and axial interference and other performance indicators is better than the traditional moving coil detector. For high-resolution, high fidelity, high-precision, seismic exploration of this application, it needs to further improve the performance of MEMS acceleration sensor. Therefore, this paper selects the MEMS capacitive acceleration sensor.This paper is as follows:First, the preface introduces the MEMS sensor research status and development prospects, and brings forward the research content and the meaning of this issue.Second, a brief description of the classification of seismic detectors, mainly introduces regular, super, digital geophone characteristics of the structure and properties of the selection principle of the earthquake detector;Then, System design, its contents are mainly:the working principle of MEMS accelerometer and the structural model, deriving accelerometer the ratio between input and output relationship, the types and selection of SCM principles, the main selected devices of this paper and their technical parameters and characteristics. After the detailed design of the system circuit,diagrams three-way AD sampling and communication between the microcontroller, using EPM7032S of CPLD chip expands I/O ports, through EPM7032S its programming to meet the 8-crossover effect on AD to film three-way election. In addition, the use of microcontroller and MAX485 converter chip serial communication PC-level translation. It designs a three-way AD, EPM7032S and three schematic microcontroller, microprocessor and an external RAM in the schematic diagram, block diagram is given for timer interrupt, AD interrupt block diagram, and the serial port receiver block diagram. And the dynamic range of detector is analyzed in detail.Finally, summary and outlook for the full text. Proposes the next step

【关键词】 MEMS加速度传感器地震检波器AD转换器
【Key words】 MEMSG-sensorEarthquake DetectorA/D Converter
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