【摘要】 基于微电子机械系统(MEMS)制成的微加速度三分量数字地震检波器,集数据采集、处理及传输功能于一体,在结构模型、工作原理、性能指标控制等方面不同于常规检波器,其信号幅值在低于自然频率范围内没有衰减。因其独特的制造技术,MEMS检波器具有超低噪声,大动态范围和极高的向量保真度性能。更多还原

【Abstract】 The acceleration triaxial digital geophone based on microelectronic mechanical system(MEMS) is a geophone concentrating three functions of data gathering,processing and transferring in one.It is different from traditional geophone on aspects of structure model,operational principle and performance indices controlling.Its signal peak value will not be attenuated when it is negative to free frequency.Since its unique manufacturing technology,the MEMS geophone has ultra-low noise,larger dynamic range and very high vectorial fidelity performances.更多还原