【摘要】 研制一种新型数字硅MEMS地震检波器,集成三支硅MEMS陀螺与加速度计,可提供三维加速度、速度、角速度及位移等振动信息,可提高检波器的信息量及效率;提出的基于无需指北单轴速率转台的硅MEMS地震检波器六位置正反速率标定方法,不仅可提高标定精度与效率,且可减小标定工作量。并经实验验证该数字硅MEMS地震检波器样机及标定补偿方法的可行性与适用性。更多还原

【Abstract】 A new-type seismic geophone,integrating three MEMS aeeelerometers and gyroscopes,was developed.It can provide informations of linear acceleration,linear velocity,angular velocity and vibration displacement with greatly improved performance and efficiency.A new six-position plus rotation calibration scheme for the digital geophone was proposed which utilizes only a single axis turn-table without north reference.The experimental results show that the proposed method improves the measurement precision,and verifies the validity of the silicon MEMS geophone.更多还原