【摘要】 介绍了一种基于AT切石英晶体谐振器力-频线性关系原理研制的土层压力传感器。该压力传感器由3个相互垂直的压力传感器和1个温度传感构成,采用等精度频率测量技术,实现高精度数据采集,用RS485串行接口进行数据传输。重点介绍了传感器的结构设计,并对弹性膜片材料和厚度与量程和灵敏度的关系进行试验和研究。研制的传感器量程为0～1.0MPa,非线性度小于1.0%,重复性误差小于0.05%,滞后误差小于0.1%,温度的测量精度为0.01℃,可用于地震监测的试验。更多还原

【Abstract】 A soil pressure sensor based on the principle of force-frequency linear relationship of AT-cut quartz crystal resonator is introduced.High precision frequency measurement is realized by use of equal-precision technology.This sensor consists of three pressure sensors perpendicular to each other,together with a temperature sensor,and RS485 serial interface is used for data communication.The structural design of the pressure sensors is described in detail,and the relationships between elastic film material and its thickness to the range and sensitivity are tested.Experimental results show that the sensor range is 0~1.0 MPa;non-linearity of less than 1.0%;repeatability error less than 0.05%,delay error is less than 0.1%,the temperature measurement accuracy is 0.01 ℃.This instrument can be used for earthquake monitoring test.更多还原