【摘要】 为测量λ/4波长以下位移,研制了激光干涉条纹锁定系统。将干涉仪的工作点稳定在暗点,使其具有线性好和灵敏度高等优点。该系统由激光器及稳频装置、干涉系统、检测及控制电路、位移反馈执行机构（压电陶瓷）,以及数据采集系统组成。实验结果表明,所研制的干涉条纹锁定系统在0～0.5 Hz的频带内,其干涉仪的分辨度达到λ/1 500水平;而在0～50 Hz的频带内,其干涉仪的分辨度达到λ/400水平。频谱分析表明,在0.1 Hz和5 Hz时的分辨度分别为7×10-11 m/Hz^1/2和1×10-11 m/Hz^1/2。更多还原

【Abstract】 A laser interferometer fringe locking system was designed to measure the displacement of λ/4.The working point of interferometer was stabilized at scotoma to achieve good linearity and high sensitivity.The system consists of a laser interferometer,a detector,a control circuit,and a displacement feedback actuator（piezoelectric ceramic）.The experimental results show the resolution of the interferometer comes to the level of λ/1 500 at the bandwidth of 0⁰.5 Hz,and the level of λ/400 at the bandwidth of 0⁵0 Hz.Spectrums analysis show that the resolution of the interferometer at 0.1 Hz and 5 Hz are 7×10-11 m/Hz^1/2 and 1×10-11 m/Hz^1/2,respectively.更多还原