【摘要】 提出了一种新型的光电集成加速度地震检波器,这是一种全新的微光机电系统(MOEMS).为实现硅基底上的光波导M Z干涉仪的相位调制,采用了声光相位调制的方法.该相位调制器利用叉指换能器(IDT)激发出声表面波(SAW)实现对光波导的相位调制.在对光波导声光相位调制机理深入研究的基础上,设计并制作了器件.实验结果与理论相一致.更多还原

【Abstract】 A novel electro-optic integrated acceleration seismic geophone is presented in this paper. Optical waveguide M-Z interferometer and processing circuitry are monolithic integrated on the silicon substrate and it is a new kind of micro-opto-electro-mechanical system (MOEMS). In order to modulate the phase of optical waveguide M-Z interferometer on silicon substrate, the method of acousto-optic phase modulation is proposed. The acousto-optic phase modulator realizes phase modulation by passing the reference beam through a surface acoustic wave (SAW) generated on a ZnO thin-film transducer driven by an interdigital transducer (IDT). On the basis of the working theory of acousto-optic phase modulation, the device is designed and fabricated. Experimental results matches well with the theoretical prediction.更多还原