【摘要】 扫描探针显微镜(SPM)等超精密加工与检测仪器容易受到外界环境微小振动等干扰,致使仪器在通常条件下无法达到要求的指标。为此,结合主动隔振和被动隔振技术研究对外界微小振动扰动有效隔离方法。以本原纳米仪器有限公司制作的CSPM4000扫描探针显微镜作为实验对象进行试验,探讨利用主动隔振系统来降低超精密仪器对于外部试验环境的苛刻要求,进而改善超精密仪器的试验性能。实验结果显示隔振试验装置具有较好的隔振效果,可满足使用要求。更多还原

【Abstract】 Scanning probe microscope (SPM) and other ultra precise machining and detective equipment are easily influenced by micro vibration disturbance in environment leading to achieve the target required difficultly in common condition. Therefore, effective isolation method is investigated by combining active and passive vibration isolation technology for out small disturbance. Taking CSPM4000 scanning probe microscope produced by Benyuan nano instrument Co., Ltd as object, it is investigated to use active vibration isolation for reducing strict requirement in exterior experimental environment, and to improve experimental performance of ultra precise instruments. Then experimental results show that vibration isolation devices act obvious effect and satisfy requirement.更多还原