【摘要】 介绍一种小型恒温系统的实现方法,使MEMS加速度计的工作区域温度保持恒定,从而改善MEMS加速度计的相关技术指标。小型恒温系统采用独特工艺,实现简单;恒温点可以根据环境温度的变化而改变,以降低功耗。实验结果表明,应用该系统的MEMS加速度计,由温度所引起的零点漂移值明显减小。更多还原

【Abstract】 Temperature fluctuation is the major reason to influence the stability and performance of instruments.This paper presents a method for the implementation of mini thermal-stable system,which can keep the temperature surrounding MEMS accelerator constant.And then,some relative parameters of MEMS accelerator can be improved.This system is easy to get,with special technology,and can change the thermal-stabe working point to reduce power consumption.The result of experiment shows that,the zero-level drift of MEMS accelerator with thermal-stable system decreases obviously.更多还原