【摘要】 低功耗、微型化、芯片化、智能化、网络化、低成本高可靠以及全频带观测是地震传感器发展的方向,利用MEMS技术可以集成满足现代传感器要求的"芯片仪器",便于布设低成本、高密度的智能化现代传感器网络.本文提出了从MEMS加速度计经积分放大器获得速度地震计的技术方案,研究指出:1)为获得50Hz有效带宽内动态范围能达到电源电压的满摆幅输出,折合后级的放大倍数在内,积分放大器的积分时间常数只能是小于3.2ms;2)为克服积分器的漂移和噪声,提出了斩波多相积分技术;3)采用成品MEMS加速度计研制的速度型地震计,动态范围可达94dB,带宽在实测的100s～100Hz内响应平坦.提出了以MEMS加速度计的差分电容作为斩波多相积分器的斩波部件而研制高分辨率MEMS速度地震计的技术方案.更多还原

【Abstract】 One contnuing trend in modern seismometer development is low power comsumption,microminiaturization,instrumentation on chip,intellectualization,low cost,reliability and full waveband observation.Take advantage of MEMS technology may meet these remands.The paper introduced how to get a velocity seismometer from MEMS accelerator by use an intergrator.It point out:1)for get full range magnitude within 50 Hz bandwidth,the integration time constant must be less than 3.2 ms;2)for get rid of drift and noise of integrator,it introduced a chopper-stabilized and multi phase integration technology;3)the dynamic range of the velocity seismometer designed from MEMS accelerator is greater than 94 dB,and its bandwidth is smooth from 100s to 100 Hz.The paper also introduced a technology that would design a higher resolution MEMS velocity seismometer by use the differential capacitance for a chopped part of the integrator.更多还原