节点文献
1000级洁净室新型气流组织的探析
Study on a New Flow Pattern of a Class 1000 Clean Room
【摘要】 以自行设计的实验台为例 ,通过测定上送单侧下回气流组织形式下的粒子浓度 ,介绍了适合于小面积 10 0 0级洁净室的这种新型气流组织形式。分析了新型气流组织下换气次数。对这种气流组织形式在小面积洁净室中的应用作了可行性和经济性分析。
【Abstract】 An experimental clean room is established as an example to recommend a new flow pattern fit for class 1000 room with small area by the way of measuring the concentration of the particle under this new flow pattern. The ventilation rate is analyzed under this new flow pattern, the feasibility and economy of the appliance of this new flow pattern is also discussed.
【关键词】 洁净室;
气流组织;
粒子浓度;
换气次数;
可行性;
经济性;
【Key words】 clean room; flow pattern; the concentration of the particle; ventilation rate; feasibility; economy;
【Key words】 clean room; flow pattern; the concentration of the particle; ventilation rate; feasibility; economy;
- 【文献出处】 东华大学学报(自然科学版) ,Journal of Donghua University,Natural Science , 编辑部邮箱 ,2003年05期
- 【分类号】TU831.8
- 【被引频次】2
- 【下载频次】115