【摘要】 与传统的传感器相比,MEMS传感器具有体积小、成本低、可靠性高、易于集成和实现智能化等特点,而近年来更多的地震仪器应用此技术,更加有助于地震研究的深入。本文分析了MEMS的发展现状,介绍了MEMS加速度计的主要分类,通过理论分析和实测背景噪声,比较机械式力平衡加速度计和MEMS加速度计的性能指标,并初步探索地震预警采用何种类型设备的技术成熟度及其可行性。更多还原

【Abstract】 Compared with traditional sensors,MEMS sensors have smaller size,lower cost,higher reliability,better integration and intelligence. In recent years,MEMS is applied to more and more earthquake instruments to deepen the research of earthquake. The development and classification of MEMS are introduced. Analyzing the background noise based on the theory and the experiments,the performance index of the mechanical force-balance accelerometer and the MEMS accelerometers are compared to select the right ones for the study of earthquake. The technology readiness and the practicability are discussed that what types of the MEMS accelerometers are applied to earthquake early warning.更多还原