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Oven升华物污染原因及防治研究

Study on the Causes and Prevention of Oven Sublimate Pollution

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【作者】 承小辉蒋迁齐勤瑞高雪松张然杨辉

【Author】 CHENG Xiaohui;JIANG Qian;QI Qinrui;GAO Xuesong;ZHANG Ran;YANG Hui;

【通讯作者】 承小辉;

【机构】 北京京东方显示技术有限公司

【摘要】 针对热烘烤设备(Oven)升华物污染现象进行系统研究,确定升华物污染形成的原因,并找到有效的改善措施。首先通过对行业各厂升华物污染现象对比,然后将升华物污染量化,采用微粒测量仪对升华物粒子数量进行测量,最后采用压力测量仪对Oven炉正负压进行测试、以及电子压差计对Oven排气管道进行压差堵塞检测,对升华物污染的原因提出合理的解释,并给出有效的改善措施。结果表明,Oven升华物污染是由于Oven炉相对外界正压造成的,而Oven排气管道堵塞会加剧正压程度。通过降低炉的进气量、增加炉的排气量以及排气管道的疏通等方式可以极大避免升华物的污染。

【Abstract】 This paper makes a systematic study on the phenomenon of sublimation pollution in hot baking equipment(Oven),determines the causes of sublimation pollution, and finds out effective improvement measures. First of all, through the comparison of the phenomenon of sublimation pollution in various factories in the industry, and then quantify the sublimation pollution, the particle measuring instrument is used to measure the number of sublimation particles. Finally, the pressure measuring instrument is used to test the positive and negative pressure of Oven furnace, and the electronic pressure difference meter is used to detect the differential pressure blockage of Oven exhaust pipe, which puts forward a reasonable explanation for the cause of sublimation pollution and gives effective improvement measures. The results show that the pollution of Oven sublimation is caused by the relative external positive pressure of Oven furnace, and the blockage of Oven exhaust pipe will aggravate the degree of positive pressure. The pollution of sublimation can be greatly avoided by reducing the air intake of the furnace, increasing the exhaust volume of the furnace and dredging the exhaust pipe.

【关键词】 热烘烤升华物正负压
【Key words】 Ovensublimationpositive and negative pressure
  • 【文献出处】 科技创新与应用 ,Technology Innovation and Application , 编辑部邮箱 ,2019年27期
  • 【分类号】X76
  • 【被引频次】1
  • 【下载频次】39
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