【摘要】 以MEMS加速度传感器为基础的新型数字地震检波器是地震勘探所用仪器的发展方向之一。介绍了一种三维MEMS加速度检波器结构,这有别于传统三分量MEMS传感器通过用3只MEMS加速度传感器按正交直角组装。并通过PSpice软件对其进行了整体仿真,仿真结果表明其阶跃响应和正弦响应基本和理论分析的结果吻合。更多还原

【Abstract】 Based on the MEMS acceleration sensor,a new type of digital geophone equipment used in seismic exploration is one of the developing directions.The structure of a 3D MEMS acceleration sensor,which is different from the traditional three-component MEMS sensor that is composed of three MEMS accelerometers according to the orthogonal angle assembly is described.The overall simulation is carried out by PSpice software.The simulation result shows that the step response and sinusoidal response mostly correspond with the results of the theoretical analysis.更多还原