【摘要】 以MEMS加速度传感器为基础的新型地震检波器大幅度提高了地震检波器的各项性能指标。介绍了一种新型的石油勘探MEMS地震检波器的设计及其主要技术参数,并通过微传感器结构的力学性能仿真,得出其具体的结构尺寸。经采用表面工艺和体工艺相结合的方法,利用磁控溅射、光刻、化学蚀刻及等离子体蚀刻等工艺,在高阻硅上制备出检波器样品。更多还原

【Abstract】 Compared with the previous ones,a new-type seismic geophone based on MEMS acceleration sensors has greatly improved its performance.The structure characteristics and main technical parameters of the new type MEMS seismic geophone for oil exploration is introduced,how the specific size of structure of the new-type seismic geophone is achieved through mechanical property simulation of the structure of micro-sensor.A sample MEMS seismic geophone have been fabricated on the high-resistance silicon wafer through the combination techniques of the surface machining and the bulk machining by using magnetron sputtering,photolithography,chemical etching and plasma etching and so on.更多还原