【摘要】 对比典型的差动电容结构,设计了一种新的折叠梁电容式MEMS低g(g=9.8m/s~2,当地重力加速度)值加速度计,指标为量程0～±2g,横向灵敏度<3%。利用有限元分析软件对模型进行了静态应力分析和模态分析,并给出了接口电路和自检测功能原理。最后设计了一套可行的加工工艺。更多还原

【Abstract】 Compared with the classical differential structure,a low g capacitive accelerometer with fold-beam mass was designed. Measuring range was 0～±2g,transverse sensitivity was less than 3%. The static stress and modal properties for the model were analyzed by ANSYS. The priciples of interface circuit and self-testable function were given. Finally,the processing method of the accelerometers was designed.更多还原