【摘要】 在集成电路制造的硅片传输过程中,硅片传输机器人等机械设备的运动会产生尘埃粒子污染硅片。为解决这一问题,设计并研制了硅片传输单元的洁净系统,分析了该洁净系统的设计方案和结构设计,计算了它的送回风管直径,并用计算流体力学的方法,对洁净系统内部的硅片传输机器人区域进行了流场的模拟分析。该洁净系统已达到设计要求。更多还原

【Abstract】 Airborne particles may be created by the moving of mechanical equipment such as wafer handling robot in the process of wafer handling of the IC manufacture. To solve this problem, the clean system of the wafer handling cell was designed and developed. Its structure design and parameter calculations were carried out. And the airflow pattern was simulated using a computa- tional fluid dynamics (CFD) method. The performance indices were implemented satisfactorily.更多还原