【作者】 范伟；

【导师】 余晓芬；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2009， 博士

【摘要】 微位移驱动技术是精密测量与精密制造的关键技术之一。随着微纳制造技术的快速发展,需求纳米级驱动控制技术的领域越来越多。本学位论文选题来源于国家自然科学基金“纳米三坐标测量机关键技术的研究”,重点研究用于微小器件表面形貌测量的全场并行共焦显微镜关键部件——六自由度纳米工作台的驱动技术及驱动系统,实现微动平台的快速调整、高精度定位和微型化。六自由度纳米工作台采用单层结构,由八个压电陶瓷驱动器并行驱动,因此必须建立工作台位移与各驱动器驱动量之间的关系;压电陶瓷驱动器具有位移分辨率高,体积小,响应快,输出力大,不发热等优点,但其固有的迟滞和蠕变严重影响了它的定位精度;驱动电源的品质直接影响工作台的定位精度,而目前市场上有售的压电陶瓷驱动电源,输出通道数、体积、输出电压稳定性均难以满足课题研制的六自由度微动工作台并行驱动的需求。因此本论文围绕六自由度纳米工作台高精度驱动控制技术开展了系统深入的研究,主要的研究工作和创新点如下:(1)建立六自由度纳米工作台并行驱动控制模型根据六自由度纳米工作台的结构参量,建立了工作台三个移动参量及三个转动参量与八个压电陶瓷驱动器驱动量之间的数学关系。(2)研究压电陶瓷驱动器高精度的开环控制方法所研制的六自由度工作台有微型化要求,没有安装位移传感器的空间,只能采用开环控制。而压电陶瓷驱动器的迟滞、蠕变特性严重影响开环控制精度。因此从压电陶瓷材料的变形机理入手,深入研究了压电陶瓷驱动器的迟滞特性和蠕变特性,提出了压电陶瓷驱动器的“抗迟滞”和“抗蠕变”高精度开环控制方法。实验结果表明:压电陶瓷驱动器的最大迟滞误差下降了90%左右,蠕变误差也减小了一个数量级,定位稳定时间也大大缩短,使通过开环控制实现六自由度的高精度定位成为可能。上述驱动方法已申请2项国家发明专利,其中1项已获批。(3)研制微型化多通道高精度压电陶瓷驱动电源性能良好的驱动电源是实现压电陶瓷高精度定位的关键,本论文研究主要从拓展通道数、降纹波、抗干扰、减小体积和控制放大器工作温度等几个方面入手,自行研制出了微型化低纹波的多通道压电陶瓷驱动电源,并完成了相应的特性标定实验。经测试,八路电源输出电压的非线性误差小于0.05%,分辨率为6mV,静态电压纹波小于9mV,功率带宽可达5kHz,连续输出电流可达1.5A,连续工作8小时电压变化量小于0.01%,体积仅为280*260*120mm(博实三通道压电陶瓷电源体积为385*150*340mm),满足压电陶瓷驱动的要求。(4)六自由度纳米工作台驱动实验研究工作台实际的结构参量与其理论值间存在差异,各驱动器特性也不完全一致,因此对六自由度纳米工作台进行了各自由度的位移特性标定实验,确定了各自由度的驱动特性,并建立了修正后的六自由度并行驱动控制模型,继而对纳米工作台的最终运动精度进行标定,实验验证了前期的研究成果。六自由度纳米工作台的最大重复性误差小于28nm,可以满足全场并行共焦检测插值采样的需求。更多还原

【Abstract】 Micro-displacement technology is one of the key technologies in precision machinery and precision instruments fields.With the rapid development of micro-nano manufacturing technology,there are more and more fields need nano-driven control technology.The dissertation is based on the project sponsored by the National Natural Science Foundation of "Nano-CMM key technology research",Focus on the driving technology and systems of a six degrees of freedom nano-table which is the key components of the whole field parallel confocal microscope used for measuring surface topography of small devices,to realization the rapid adjustment,high-precision positioning and miniaturization of the micro-platform.Six degrees of freedom nano-table with single-layer structure is driven by the eight parallel PZT,therefore it’s necessary to establish the relationship between the table displacement and the driving volume of every PZT.The PZT actuator demonstrates superior characteristics of high displacement resolution,miniature size,high-frequency response,strong power,no generate heat etc.But the inherent hysteresis and creep effect the application of PZT badly.The quality of PZT power supply will impact the positioning accuracy of table directly.At present,the PZT power supply in market for sale,not only the number of output channels,but also the volume and output voltage stability are difficult to meet the demands of the parallel driving of six degrees of freedom nano-table.In this dissertation,carried out a systematic study in depth about the high-precision driving control technology around the six degrees of freedom nano-table.The main works and its originality of this dissertation are as follows:(1)The establishment of six degrees of freedom nano-table- parallel control modelIn accordance with the structure parameters of six degrees of freedom nano-table,the mathematical relationship between three mobile workstations parameters and three rotation parameters with the driving capacity of eight PZT have been established.(2) The research on high-precision open-loop control method of PZTBecause the requirements of miniaturization,there is no space for the installation of displacement sensor on the six degrees of freedom nano-table,only the open-loop control could be adopted.But the hysteresis and creep of PZT impact the open-loop control accuracy badly.From the deformation mechanism of the PZT,the hysteresis and creep characteristics of PZT have been studied deeply.The high-precision open-loop control method of PZT "anti-lag" and "anti-creep" also have been made.The experimental results show that:the hysteresis error of the PZT has been reduced about 90%,the creep error also be reduced of an order of magnitude,and the location time has been greatly shortened,It makes the adoption of open-loop control to achieve high-precision positioning of six degrees of freedom become possible.The above-mentioned methods have applied for two national invention patents,which have been granted one.(3) The development of miniaturized multi-channel high-precision PZT power supplyGood performance of driving power supply is the key to achieve high-precision positioning of the piezoelectric ceramic.In this paper,mainly from the expansion of power-channel-count,lower ripple and interference,reducing the volume and temperature control of amplifier such as aspects,developed own micro-low ripple of the multi-channel PZT power supply,and completed the corresponding experiments of the calibration characteristics.By testing,the output voltage of eight channels shows good linearity,the nonlinear error is less than 0.05%.the resolution is 6mv,the static ripple voltage is less than 9mV,the power bandwidth could be 5kHz,the continuous output current could be 1.5A,the voltage variation is less than 0.01%after eight hours continuous working.The volume of power supply is only 280~*260~*120mm(The volume of three-channel PZT power supply of BOSHI is 385~*150~*340mm),the power could satisfy the requirements of PZT driving.(4) The research on driving experiments of six degrees of freedom nano-tableThere are differences between the actual parameter values with the theoretical values of the table,and the characteristics of the PZT is not exactly the same,so the displacement calibration experiments on six degrees of freedom nano- table have been made,the driving characteristics of various degrees of freedom have been determined,and established a revised six degree of freedom parallel-driven control model,then the final campaign precision of the nano-table has been calibrated,the preliminary research results have been verified by experiments.The largest repeatability error of six degrees of freedom nano-table is less than 28nm,could meet the needs of the sample interpolation for whole confocal microscope in parallel.更多还原