【作者】 李伟；

【导师】 赵宝升；

【作者基本信息】 中国科学院研究生院（西安光学精密机械研究所） ， 物理电子学， 2009， 博士

【摘要】 用于电子工业的高分辨率射线数字化成像技术是众多中小电子工业厂家迫切的需求。本文的目的是开发一种低成本高分辨率的X射线实时数字化成像检测的技术与系统。以填补国内此类产品的空白。首先介绍了课题的意义、要求及国内外的研究现状。研究总结了X射线检测的物理基础与X射线成像的原理。分析了目前相对较成熟的X射线数字成像系统的原理及优缺点,研究了胶片成像的评价方法和目前较成熟的射线数字化成像系统性能的评价方法的特点。然后针对课题的要求,提出了基于MCP-X射线像增强器的电子工业用X射线检测系统的设计方案并详细介绍了其研制过程。分析了成像系统的设计思路与总体方案,建立了该检测机系统分辨率的数学模型,并开发完成了该电子工业用X射线检测机专用检测软件。对所研制的成像系统中影响成像质量的主要环节进行了分析研究,对系统成像中图像随机噪声进行了校正并提出了在工程化中帧积分算法的改进方法,对系统成像中固有不均匀噪声进行了校正,提出了曲面拟合的多项式校正算法并给出了校正实例。实验证明,本文开发的用于电子工业的低成本高分辨率X射线检测机达到了课题的要求。与其他成像系统相比有其优势和独特之处。文中也说明了不足之处和需进一步完善的工作。更多还原

【Abstract】 High-resolution X-ray digital radiography used for electronic industry is urgent requirement of all small and medium-sized electronic industrial manufacturer. The aim of this dissertation is to develop the low cost real-time digital high-resolution X-ray inspecting technology and system.In this dissertation, first of all, the subject demands and international study status are introduced. The basic knowledge of X-ray detection and the theory of X-ray imaging are studied and summarized .The advantage and disadvantage of mature X-ray digital imaging system, the evaluating methods of radiography with film and mature digital radiography are analyzed and contrasted.To the question of demands of the subject, put forward the design of x-ray inspecting system used for electronic industry based on MCP X-ray image intensifier and made a detailed introduction to the system’s process of developing. Author analyzed principle of design and overall planning of this system, build the systemic resolution mathematical model of this radiation imaging system, complete the specialized software of this X-ray inspector based on this system used for electronic industry. Some Influencing imaging quality factors of this digital radiography are analyzed from the theory to the experiment. Put forward the correction algorithms for the random noise in digital radiographic images of this system and the improvement of frame integral algorithm in the engineering. Developed the correction algorithms to compensate for this system’s nonuniformity. Made the polynomial fitting algorithm based on least-mean-square method to correct the image data and given some examples of correction. The experiments had proved that low cost real-time digital high-resolution X-ray inspector used for electronic industry developed by author achieved the demands of subject. This digital radiography has some unique characteristics. Some shortages of study and works need for perfecting are indicated.更多还原