【作者】 徐玉峰；

【导师】 任晓敏；

【作者基本信息】 北京邮电大学 ， 电磁场与微波技术， 2009， 博士

【摘要】 随着信息技术的迅速发展,大容量、高速率的信息传输处理能力已成为信息网络的迫切需求。用光子载体替代电子载体实现高速互连,以光子技术或光电子技术替代微电子技术,发展光集成技术或光电子集成技术,将把信息技术推向一个全新的阶段。本论文研究工作主要围绕任晓敏教授担任首席科学家的国家重点基础研究发展规划（973计划）项目（No:2003CB314900）以及课题组承担的国家自然科学基金重点项目（No:90601002）、国家863计划项目（No:2003AA31g050、2003AA312020、2006AA032416、2007AA032418）、国际科技合作重点项目计划项目（No:2006DFB11110）展开。针对WDM系统中集成解复用接收器件及应用于其中的功能微结构进行了研究。制备了两种弧形微结构,初步探讨了弧形微结构在光探测器的应用;设计了几种基于微环谐振腔的光器件,并进行了比较详细的理论分析;对基于InGaNAs新材料的GaAs基单片集成长波长“一镜斜置三镜腔”光探测器进行了理论和实验上的初步研究。取得了以下主要研究成果:1.首次制备了两种弧形微结构:一种为空气隙型弧形微结构;另一种为实体弧形微结构。空气隙型弧形微结构是利用相邻两层半导体材料之间的晶格差异产生的切向应力来实现弧形结构。这种结构具有制作工艺简单的优点,但是空气隙型弧形微结构的接触倾角变化范围和曲率半径不具备完全可控性。实体弧形微结构采用本课题组独创的可控自推移动态掩膜湿法刻蚀技术制备,这种结构可以完全解决空气隙型弧形微结构中的可控性问题。通过调整腐蚀液中某几种组分的始末溶液浓度以及滴定溶液的滴定速度,可以完全的控制弧形微结构的角度变化范围和曲率半径。基于我们制备出的弧形微结构,初步探讨了弧形微结构在光探测器中的应用。2.设计了一种由三个微环谐振腔构成的波导反射镜,其中三个微环谐振腔呈“品”字形分布。采用传输矩阵方法,对该反射镜的反射光谱进行了分析,得到了解析表达式。分析结果表明由于耦合谐振腔的模式分裂,这种波导反射镜的反射光谱存在多峰结构,并且反射光谱中可以产生极窄的透射峰（FWHM～0.02nm）,这种透射峰是三个微环谐振腔内的场相互干涉产生的耦合谐振诱导透射现象。这种极窄的透射峰有可能应用于需要极窄光谱的场合。当微环谐振腔之间的耦合系数κ和直波导与微环谐振腔之间的耦合系数κ_in满足一定条件时,可以得到平顶响应的反射谱,并获得实现平顶响应时κ和κ_in之间的函数关系。3.由于耦合微环谐振腔光波导（Coupled Microring ResonatorOptical Waveguide,CMROW）中包含的微环谐振腔的数目是有限的,因而导致了在透射谱和群时延谱中存在严重的震荡现象,这种震荡现象被称为CMROW的有限尺寸效应。我们对CMROW中的有限尺寸效应问题进行了研究。通过对称优化CMROW两端微环谐振腔之间的耦合系数,可以有效地抑制有限尺寸效应,从而获得了良好的平顶陡边透射谱和平坦的群时延谱。采用数值方法分别得到了弱耦合和强耦合情况下的优化交叉耦合系数,并得到了优化交叉耦合系数的拟合公式。该公式对制备实际的具有平坦透射谱和群时延谱的CMROW具有指导意义。4.提出了一种由不同尺寸微环谐振腔级联耦合构成的复合微环谐振腔光探测器。复合微环谐振腔系统通常用来实现Vernier效应,以拓宽单个微环谐振腔光谱的自由谱域（Free Spectrum Range,FSR）。我们发现复合微环谐振腔系统中的Vernier效应和谐振腔系统的结构对称性有关。在结构完全对称的谐振腔系统中,Vernier效应无法实现,此时的透射谱中会出现类似Fabry-Perot滤波器的透射峰。利用这一性质可以实现一种新型的复合微环谐振腔光探测器。这种新型光探测器可以有效地拓展单个微环谐振腔光探测器量子效率谱的FSR,同时还能具备更窄的光谱半高全宽（FWHM）,有效的改善了单微环谐振腔型光探测器量子效率谱的FSR和FWHM的相互制约问题。5.实现了基于InGaNAs/GaAs多量子阱材料的单片集成GaAs基长波长“一镜斜置三镜腔”光探测器。我们和中科院半导体牛智川教授课题组合作生长了InGaNAs/GaAs多量子阱材料,并研制成功了1.3μm和1.55μm波段的GaAs基长波长“一镜斜置三镜腔”光探测器。其中1.3μm波段的InGaNAs/GaAs多量子阱“一镜斜置三镜腔”光探测器的峰值响应波长位于1298.4nm,FWHM为1nm,量子效率约3%。1.55μm波段的InGaNAs/GaAs多量子阱“一镜斜置三镜腔”光探测器的峰值响应波长位于1537nm,FWHM为1.5nm,量子效率约2.4%。器件的光谱线宽体现出了“一镜斜置三镜腔”结构的优越性,但是由于目前InGaNAs材料的生长质量还不够理想,因而器件的量子效率偏低。进一步改善材料质量后,将有可能实现高性能的单片集成GaAs基长波长“一镜斜置三镜腔”光探测器。更多还原

【Abstract】 With the rapid development of information technology,it’s becoming an urgent need for large capability,high speed transmission and management.Information technology will be push to a new stage by substituting photon technology or optoelectronic technology for micro-electronic technology,and developing optical integration or optoelectronic integration.The research in this thesis is supported by grants from The National Basic Research Program of China（No.2003CB314900）,Key Program project of the National Natural Science Foundation of China（No: 90601002）,the National High Technology Research and Development Program of China（No:2003AA31g050,2003AA312020, 2006AA03Z416,2007AA03Z418）,and Program of Key International Science and Technology Cooperation Projects（No:2006DFB11110）.In this thesis,a great deal of research work can be described as follow.Design and fabrication of arc microstructures;design and analysis of a new kind of photodetector with arc absorption cavity.Design and analysis of some new kinds of optical devices based on semiconductor microring resonators,which include coupled-microring waveguide reflector,coupled-microring resonator optical waveguide and compound coupled-microring photodetector.Design,analysis and fabrication of"one mirror inclined three mirror cavity"（OMITMiC） photodetector basing on InGaNAs/GaAs multi-quantum wells.The main achievements are listed as follows.1.Two different programs to achieve an arc absorption microstructure were proposed and studied in experiment.One is realized by air-gap technique,in which one of epitaxy layers is etched by selective chemical wet etching techniques.With the air-gap,the cantilever will bend for the tangential stress and an arc absorption cavity is obtained. The fabrication process of air-gap arc absorption cavity is very simple, but the controllability of angle range and the curvature radius of arc microstructure are not so good.The other is realized by dynamic etch mask technique.With this technique,the angle range of arc microstructure can be controlled by varying the initial and the final concentration of solutions,and the radius of arc microstructure can be controlled by varying the time of titration.A new kind of monolithically integrated photodetector with arc absorption cavity was proposed and demonstrated.2.An optical waveguide reflector based on coupled-triple-microring is designed and analyzed.The reflectivity of the reflector is analyzed and the analytical expression of reflectivity is obtained with transfer matrix method.The simulation results show that the reflection spectrum has multiple peaks,and transmission peaks with very narrow FWHM（～0.02nm） were found in this structure,which are named coupled resonator induced transparency.With suitableκandκ_in,fiat response spectrum can be achieved in this waveguide reflector.3.Minimization of finite-size effects（FSE） in coupled-microring resonator optical waveguide（CMROW） is studied.There are fringes in the transmission spectrum and group delay spectrum for the finite number of resonators in CMROW,which is referred FSE.Finite-size effects can be minimized with the optimized cross-coupling coefficients at both ends of CMROW.The cross-coupling coefficients need to be optimized are obtained with numerical methods for weak coupling and strong coupling respectively.The fitting formulas of the optimized cross-coupling coefficients are obtained according to simulation results.4.A new kind of compound coupled-microring photodetector was proposed and demonstrated.Generally,compound coupled microrings are used to realize Vernier effect.But we found that Vernier effcect can not be achieved if the architecture of compound coupled microrings is symmetrical,and a special transmission spectrum is obtained which is similar to the transmission spectrum of Fabry-Perot filter.A compound coupled-microring photodetector is achieved based on the special spectrum.The response spectrum with larger FSR and smaller FWHM is obtained in this novel coupled-microring photodetector.The mutual restriction between the FSR and FWHM of quantum efficiency in a single-microring photodetector is effectively resolved.5.The monolithically integrated GaAs-based OMITMiC photodetectors, operating at 1.3 um and 1.5um respectively,were designed and fabricated successfully with InGaNAs/GaAs MQWs structure for the first time.At 1298.4nm,a quantum efficiency of 3%with a full width at half maximum of 1nm was obtained.At 1537.6nm,a quantum efficiency of 2.4%with a full width at half maximum of 1.5nm was obtained.更多还原