【作者】 黄大刚；

【导师】 王宝光；

【作者基本信息】 天津大学 ， 测试计量技术及仪器， 2007， 博士

【摘要】 针对现有各种非球面测量方法存在的问题,提出一种基于高分子微球的坐标测量新方法,将聚苯乙烯微球附着在被测表面上,通过测量微球坐标得到非球面轮廓。为消除显微物镜景深对测量范围的限制,将一束激光会聚于微球上,激光束被微球两次折射后成为准球面波,与另一束作为基准的平面波干涉,产生环形干涉条纹,测量干涉条纹中心位置,确定微球的坐标;在二维标尺上测量环形干涉条纹中心的位置,彻底消除了机械导轨直线度误差引起的测量误差;采用直径一致的微球实物标准进行测量,消除了微球直径不一致引起的测量误差。为按实测值计算、分析光学系统的成像质量,提出计算非球面光轴的算法、给出坐标变换公式,并导出从坐标测量值计算标准形式非球面方程的算法,解决了因光学设计软件只认标准非球面方程,不认坐标,导致无法按实测值计算像差和光学传递函数的问题;通过实例证明算法本身产生的误差与测量误差相比,可以忽略不计,并得出在一定测量误差意义下非球面方程表达式不唯一的结论。作为非球面测量新技术的跨学科应用实例,提出一种基于单模光纤标定微操作机器人系统的新方法,用安装在被标定部件上的单模光纤产生球面波,与作为基准的平面波干涉,在两块相互垂直安装的二维标尺上分别采集环形干涉条纹的图像,在毫米级空间实现了对微操作机器人系统中各坐标系进行亚微米精度的三维标定。更多还原

【Abstract】 Aimed at the drawbacks in current aspheric testing technologies, a novel method of measuring coordinates based on macromolecule micro-balls is presented. Some polystyrene micro-balls are adhered on the tested surface, then the aspheric camber is obtained through measuring the coordinates of micro-balls. In order to eliminate the limit of depth of field for measurement range, a beam of laser is focused on a micro-ball, then a quasi-spherical wave is formed by twice refraction on/in the micro-ball. So some circle interference fringes appear after the spherical wave interfering with a datum plane wave. The central position of the circle fringes is measured on a 2D scale plate so that to completely eliminate testing errors caused by linearity error of mechanical guide tracks. The measurement error caused by diameter error of micro-balls might be cut down if stand-substance micro-balls are used for measurement. To calculate and analysis image quality of optical system according to measured value, an algorithm for calculating optical axis of measured surface and coordinate system transform formula are given. To solve the problem that coordinates can not be inputted to optics design software, an algorithm of calculating aspheric parameters from coordinates is presented. An example shows that the aspheric equation can be multi-expressed for a given error, and the errors from the algorithm can be ignored because it is much smaller than the errors from measurement.To apply the novel method of aspheric measurement to the field of robot, a calibration method for micro manipulator system based on single mode optical fiber is developed. A spherical wave from the fiber fixed on the tested element interfered with a datum plane wave, then the images of the circle fringes are collected from two 2D scale plates which are fixed vertically. So 3D calibration for each coordinate system in sub-micron grade is realized in millimeter grade space.更多还原