【作者】 谢永军；

【导师】 卢振武；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 光学， 2004， 博士

【摘要】 在曲面上制作衍射光学元件有很多重要的应用。含有曲面衍射光学元件的光学系统结构更加简化，重量更轻，体积更小，因此在航天成像系统、军事领域、光学表面检测、光谱分析等领域具有重要的应用价值。 本文在国家自然科学基金(60078006)和中科院创新基金(2002LQ4)，以及中科院应用光学国家重点实验室的资助和支持下，开展了利用光刻技术在大口径凹球面玻璃基底上制作衍射光学元件的相关工作： 1．对激光直写光刻的曝光量分布和线宽控制进行了相关理论分析和实验。 2．利用对线条端部数据进行优化的方法解决了激光直写线条对接技术。 3．通过选择合适的涂胶参数，在凹透镜表面上进行了薄光刻胶胶层的均匀涂布。 4．利用激光直写光刻技术在大口径凹透镜表面上制作衍射光学元件。 5．采用两次曝光的方法在凹透镜表面上厚光刻胶中制作衍射光学元件。 6．在凹透镜表面上制作出了用于凸非球面检测的曲面全息图。 最后给出了下一步的工作和该技术的发展前景。更多还原

【Abstract】 It is useful in many applications to fabricate large computer-generated diffractive optical elements (DOEs) on curved surfaces. The refractive/diffractive hybrid optical system is more simple, light, and compact. There are many applications for use in the measurement of convex secondary mirrors, ultraviolet spectroscopic instruments, armament, and space optical system.In this paper, series of work about the fabrication of large computer-generated diffractive optical elements on curved surfaces is carried out supported by the National Natural Science Foundation (60078006) and State Key Laboratory of Applied Optics of the Chinese Academy of Science.1. The exposure dose distribution and line width control for the laser direct writing system are analyzed. Some experiments are also carried out.2. We present a new method to correct the joint error of laser writer without the reduction of throughput. By digitization, we optimize the intensity data of the incidence beam at the vicinity of start point and end point.3. We obtained photoresist film with uniform thickness on the large concave substrate by selecting proper spin-coating parameters, which mainly involve spin rate, spin acceleration, and viscosity of the photoresist.4. We demonstrate experimentally the lithography technique to fabricate a large computer-generated diffractive optical element (DOE) pattern on a concave lens surface with precise alignment by using a laser direct writer.5. We demonstrate experimentally the technique to fabricate large DOEs in the thick film on a concave lens (mirrors) surface with precise alignment by using the strategy of exposure twice.6. We fabricated a large computer-generated holography on a concave lens surface to test the convex secondary mirrors surface.At the end of this paper, the prospect of this work and technique is given.更多还原