【作者】 席占稳；

【导师】 赖百坛；

【作者基本信息】 南京理工大学 ， 机械电子工程， 2003， 博士

【摘要】 微机电系统(MEMS)将对引信的发展提供其它技术不可比拟的技术支撑。本文主要内容可分为两大部分：硅微加速度传感器的设计、制造和测试；基于硅微加速度传感器的引信发射环境的识别。 文中首先分析了国内外硅微加速度传感器研究所取得的成果，根据引信环境信息探测的要求确定了结构简单、加工工艺相对容易、成本较低的压阻式加速度传感器作为引信发射环境识别的传感器。在参数选择基础上，设计了传感器的结构和工艺路线，并经过几个批次的试制，成功地加工出了传感器样机，利用马希特击锤对传感器样机进行了动态标定，标定结果令人满意。 文中分析了基于硅微加速度传感器的环境识别的引信安全性和可靠性，提出了基于加速度传感器的引信发射环境识别的阈值+时间窗法。指出了由于采用加速度传感器，引信安全系统的设计将由结构设计转化为环境识别方法的软件设计。提出了MEMS的发展在三个层次上可能改变未来引信的面貌，即部件级，可制作固态安全系统；产品级，导致固态引信的发展；系统级，实现制导——引信一体化。更多还原

【Abstract】 Micro Electromechanical Systems (MEMS) will provide new technical support , which the other technology can not provide. The paper can be divided into two parts: the design, manufacture and test of the silicon micro-machined acceleration sensors and the circumstances - identify of the fuze which is based on the silicon micromachined acceleration sensors.At first, the production of the research on the silicon micromachined acceleration sensors is analyzed home and abroad. The simple - structure, facility - process and low - cost piezoresistive accelerometers are used in the fuze to feel the circumstances of launch, which is under the request of the detection of the circumstances of the fuze. The structure and the process of the sensors are designed according to the preferences. The samplers of the sensors are produced successfully. The samplers are demarcated dynamic, and the results turn up trumps.The security and the reliability of the fuze are analyzed during the circumstances - identify which is based on the silicon micromachined acceleration sensors in this paper. The method, threshold - time - gate is put forward which is used to identify the circumstances of launch, which is based on this kind of sensor. The paper points out that the design of the safety and arming system (S&A) of the fuze will translate from structure design to software of the circumstance - identify design. At last, the paper points out that the developments of the MEMS will change the design of the fuze on three levels. Component level which can be used to machining solid-state S&A, production level which will result in the developments of the solid - state fuze, system level which will realize the integration of the control, guide and the fuze.更多还原