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基于MEMS技术的PCR芯片的研究

Design and Fabrication of a PCR Biochip Based on MEMS

【作者】 赵湛

【导师】 崔大付;

【作者基本信息】 中国科学院研究生院(电子学研究所) , 物理电子学, 2003, 博士

【摘要】 PCR芯片是对微量DNA进行扩增放大的一种生化反应芯片,在整个生物芯片的研究和发展中起着重要的作用。综合国内外在PCR芯片研究方面取得的成果,采用基于MEMS技术的研究方法,在硅基片上实现了集成的PCR芯片。芯片上集成了DNA反应室,微通道、温度传感器以及加热体等功能和部件,大小为8mm×4mm×0.3mm。利用深刻蚀技术制作出一个4mm×2mm×0.3mm容积约为2微升的反应室,反应室的底为约2微米厚的氮化硅(Si3N4)膜。铂加热子和温度传感器是在Si3N4膜上沉积和制作出图形形成的。这样的PCR芯片可以使系统微型化,可以很方便地应用在医疗诊断、野外生化分析等领域。配合PCR芯片研制了微型热循环控制系统,包括硬件和软件两大部分。硬件的设计主要从减少尺度,降低功耗等方面考虑,以实现和PCR芯片相适应的仪器微型化,从而达到便携、快捷地实现DNA—PCR的反应。软件部分从温度控制精度、以硬件简捷、操作以人为本的原则进行编制。研究设计了不同PCR芯片的结构和加热子等的热传导、温度场分布等物理特性。从理论上证明设计的可行性。进行了PCR芯片的实验前的表面处理方法的实验,选用乙肝病毒的试剂盒,进行了芯片上的DNA扩增实验。DNA利用SYBR@GreenⅠ荧光染料进行标记,扩增的产物在荧光显微镜下用Cool CCD记录,取得了满意的结果。PCR芯片的物理特性如下:1.反应池容积:<2μl;2.升温速率:可达15℃/s;3.降温速率:可达10℃/s;4.控温精度:≤0.4℃;5.功耗:<800mW。

【Abstract】 DNA PCR amplification is bioreaction for DNA analysis. It expands a little to a large amount of DNA molecule. Reviewing the research on the PCR biochip, one monolithically integrated was designed and fabricated in a substrate based on MEMS technology. DNA reaction chamber, microchannel, temperature sensor and heater are integrated on the PCR biochip. The chip PCR is realized with the material of silicon with the size of 8mm ×4mm ×0.3mm. The volume of chamber is roughly 2 micro liters with the size of 4mm×2mm×0.3mm.The bottom of chamber is constructed by the film of Si3N4 with the thickness of 2 micrometers. The platinum heater and temperature sensor are deposited on the Si3N4 film. With the PCR biochip, a miniaturized analyzing system can be realized for PCR, and it can be very expediently applied to the medical, environment analysis in outdoor. Matching with the PCR biochip, a miniaturized heat cycler system is designed and fabricated with proper hardware and software.The design of the hardware is based on the principle of reducing the dimensions, lowering the power consumption, fabricating a pocketable instrument. The software is a key part for accurately control the temperature and easy operation etc. In the paper, PCR biochips with different structrues were designed and researched in the respects of its physical characteristics including thermal transfer of the heater, the temperature field distribution etc. A standard Hepatitis B (HB) testing reagent was used as thermal cycling materials for DNA amplification with the PCR biochip. The experiment employed the fluorescent dye S YBR Green I assay technique so that a fluorescent can be detected. The test has been completed with enhanced fluorescence result when 30 cycles finished on the PCR biochip. The PCR biochip’s characteristic is as follows: 1.chamber capacity :<2 μl. 2. heating rate 15℃/s. 3.cooling rate 10 ℃/s. 4. temperature accuracy ≤0.4 ℃. 5. power consumption <800 mW.

【关键词】 MEMS技术PCR生物芯片单片集成
【Key words】 MEMS technologyPCR biochipmonolithic integration
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