【作者】 陈刚；

【导师】 黄尚廉； 温志渝；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2002， 博士

【摘要】 作为一种典型微型光机电系统——微型光谱仪器，具有许多大型光谱仪器所不具备的优点，并有着广泛的应用范围。因此微型光谱仪器的研制已成为微型光机电系统的一个重要研究热点。 本论文的工作得到了国家自然科学基金重点项目的资助，在前期成功研制出折衍混合集成微小型光谱仪的基础上，进一步对微型光谱仪的相关基础理论进行了深入的探讨，以期研制出接近实用化的混合集成微型光纤光谱仪。本文主要工作如下： ①本文在查阅了大量文献、资料和总结前期研制折衍混合集成微型光谱仪的基础上，分析了光谱仪在微型化中应具备的特点和微型化带来的在性能参数上一些不可避免的矛盾。 ②深入研究了光电阵列探测器的像元宽度对光谱仪器性能影响。提出了在满足采样定理的前提下，采用频域反卷积的方法来消除由像元宽度对光谱峰值定位造成的亚像元误差。 ③编制了相应的光学追迹程序，对光栅的分光成像进行了模拟，对光谱仪进行了优化设计。 ④研究了采用小波变换来消除光谱信号中的噪声和背景信号的方法，并深入研究了小波变换处理对真实光谱信号的影响，提出了采用小波变换消除光谱高频噪声和低频背景信号的方法。 ⑤在研究微型光谱仪光谱信号特点和探测器噪声特点的基础上，编制了相应的信号采集处理程序。 ⑥研制出了反射式混合集成微型光纤光谱仪样机。用汞灯作为标准光源对系统进行了测试和标定，实验结果表明：该光谱仪光谱分布的线性度好；在采用多模光纤(芯径50um，数值孔径0.2)作为光输入时，光谱分辨率为13.8nm；在采用单模光纤(芯径9um，数值孔径0.1)作为光输入时，光谱分辨率为5.7nm；探测器的像元分辨率为0.66nm。更多还原

【Abstract】 As one of the typical MOEMS,the micro-spectrometer has many advantages compared with traditional spectrometers. It can be used in many areas. For these reasons,research on the spectrometer has become one of the research focuses worldwide.With the support of the Chinese National Nature Science Fund,based on the previous research work on the refraction-diffraction hybrid integrated micro spectrometer,the basic theories have been further studied. The final goal of this study is to fabricate a reflection hybrid integrated micro fiber spectrometer with a performance approximate the practical use. The primary coverage is listed as following.In this paper,the difficulties in the fabrication of such device have been analyzed.The influence of the detecting array on the spectrum signal is studied. A solution is put forward to correct the displacement error caused by width of the light activated element,when the sampling theorem is satisfied.To optimize the optical structure of the micro spectrometer,ray tracing computer program is developed to simulate the dispersing and imaging procedure of the micro spectrometer. The application of wavelet transform in the spectrum signal processing is studied. The influence of the transform on the Gauss spectrum peak is analyzed. A method is proposed to reduce the noise and background in the spectrum signal obtained by the micro spectrometer.On the base of the characters of the noise and spectrum signal,a signal acquiring and processing program is developed.A micro spectrometer is fabricated and experiments are carried out to test the performance of this device. In experiments,the light source is Hg lamp. Optical fibers with different radius and numerical aperture are used as the input units. The results show a fine linearity. The spectrum resolution is about 13.8nm,when a multimode fiber is used. A resolution of 5.7nm is archived,when a single mode fiber is used. The pixel resolution is about 0.66nm.更多还原