【作者】 赵博；

【导师】 郝德阜；

【作者基本信息】 中国科学院长春光学精密机械与物理研究所 ， 机械制造及其自动化， 2000， 博士

【摘要】 大面积衍射光栅的研制一直是国际光栅领域的重大课题之一，同时大面积光栅的获取也是光栅研制的一个技术难点。针对研制大光栅刻划机的诸多技术困难，国外光栅专家们开始探索采用其他手段来获取大面积衍射光栅。拼接大光栅的出现引起了国际光栅界的密切关注，美国、加拿大、俄罗斯以及日本等国家的光栅专家对拼接技术进行了大量的研究工作，推动了大面积衍射光栅研制技术的发展。本文在国外拼接光栅已取得成果的基础上，在国内首次提出了利用相位拼接来制取大面积衍射光栅的方法，并对相位拼接进行了较全面的研究： 1、回顾了大面积衍射光栅的特点、应用及发展现状，详细介绍了国外拼接光栅所取得的成果，分析了国外两种典型的拼接光栅的方法，突出了用拼接方法制取大光栅的优点。 2、明确以拼接光栅的相位精度为研究目标，对相位拼接及检测的原理进行了详细说明。直接从分析光栅衍射波阵面间的相位差入手，利用光栅的空间衍射方程和空间坐标变换的方法，首次推导了不同情况下拼接光栅衍射波阵面间相位差的数学表达式，在理论上揭示了衍射波阵面间的相位差与光栅间相互位置的内在关系，对衍射光栅实际上的拼接起了正确的指导作用。 3、从Fraunhofer光学远场衍射原理出发，建立了拼接光栅衍射光强的数学模型，利用Mathcad7.0编制计算程序对相位拼接光栅的衍射光强进行了模拟计算，从理论上证明了拼接光栅在提高衍射光强的同时也提高了光谱分辨率。 4、用设计出的微动结构进行了相位拼接实验，介绍具体拼接过程的同时给出了相应的实验结果照片，通过对拼接光栅进行的相位检验，结果证明相位精度优于1/3条纹，证明了此方法的可行性。更多还原

【Abstract】 The manufacturing of large diffraction gratings is always a great task for discussion in the field of grating. And that the technique how to get the large gratings is also a very difficult thing. The overseas grating experts have to search the other ways so as to get them, because it have to face some unovercomed technique problem for setting up the large ruling machine. The appearance of the large mosaic gratings attracts all people who devote themselves to the manufacture of diffaction gratings. Some experts who come from America,Canada,Russia and Japan have been doing a lot of research about the large mosaic gratings. The technique to manufacture the large diffraction gratings have been promoted highly. Based on the former fruits.a method that manufacture the large diffraction gratings by phase matching was brought forward in this disseration.The main works shown as below:1. Retrospect the characteristic.application and development of large diffraction gratings and introduce the overseas fruits in details. Analyze two overseas typical methods of large mosaic gratings. At meantime,some advantages of the large gratings made by the mosaic method were shown out.2. The theory of the phase matching and testing were discussed in details. Some formulas were deduced firstly in this paper by using of the grating space diffraction equation and the method of coordinate transformation. The internal relationship between the diffraction phase difference and the location of the gratings was opened out. At meantime,this relationship was used to direct the virtual mosaic grating course successfully.3.The mathematical model of the mosaic grating’s diffraction intensity was set up by using of the Fraunhofer Principle. The diffraction intensity was analog calculated by using of the MathcadT.O program. The calculation result show that the intensity and the spectrum resolution power increase highly.4.The experiment equipment was designed and the phase matching experiment was done too. The course of experiment was discussed and the result photos were given. The result show that this method is feasible.更多还原