【作者】 徐秀梅；

【导师】 卢革宇；

【作者基本信息】 吉林大学 ， 微电子学与固体电子学， 2014， 博士

【摘要】 近年来，持续雾霾天气已经严重地影响了国民健康，如何对污染源进行实时监控和对大气环境质量进行在线监测是迫切需要解决的难题。高灵敏、高选择和高可靠的气体传感器研究开发变得非常重要。NO2和O3是典型的大气污染物，对大气中NO2和O3的实时在线监测是空气质量预报和大气科学研究的紧迫需求。本论文主要面向上述两种典型大气污染气体的实时监测，从改善敏感材料微纳结构入手，对ppb量级NO2和O3灵敏度、检测下限和选择性进行检测。在进行大量文献调研和预研的基础上，发现氧化铟与其它半导体氧化物相比，对NO2和O3具有更加优异的传感特性。氧化铟电导率较大，有利于构建简单的传感系统。本论文旨在研究氧化铟分等级结构的设计、制备以及气体传感特性。通过调节水热合成条件对氧化铟的形貌进行调控，主要通过改变反应温度、选择沉淀剂、优化沉淀剂浓度、筛选表面活性剂来调控氧化铟的形貌和微纳结构，进而研究气体传感特性与形貌和微纳结构的关联规律。论文主要工作包括：1.利用简易水热/溶剂热方法，得到结构均匀、分散性好的纳米片、多层次花状、花状微球、星型花状及海胆花状等不同形貌分等级结构氧化铟。通过XRD、SEM、TEM、BET等对材料的结构、组成和形貌进行了表征。2.通过静态配气法对不同分等级结构氧化铟进行气敏性能测试。气敏测试结果表明，与纳米片相比，多层次花状氧化铟对NO2具有较好的气敏特性。3.星型花状结构氧化铟可以在室温下对NO2进行检测，且具有较高灵敏度。海胆状结构氧化铟对O3具有快速响应恢复特性。4.气体传感性能测试的结果表明，氧化铟传感器具有较低的功耗和工作温度。本论文对不同微纳结构氧化铟生长机理和敏感机理进行了初步研究，发现氧化铟的形貌和微纳结构会因其制备温度、表面活性剂种类、沉淀剂种类及加入量还有溶剂种类的不同发生改变。微纳结构的增感效应可归因于其较大的比表面积和良好的通透性，因为这些结构特征能够显著提高传感器的识别功能和敏感体利用效率。更多还原

【Abstract】 In recent years, the fog and haze of our country continues have seriously affected the health ofpeople. How to perform real-time monitoring of pollution sources and on-line monitoring of thequality of atmospheric environment is an urgent problem need to address. The research anddevelopment of high sensitivity, high selectivity, and high reliable gas sensor becomes veryimportant.NO2and O3is a typical atmospheric pollutants, NO2and O3real-time online monitoring of airquality forecasting and atmospheric research in the atmosphere is an urgent problem to address.This paper mainly for the two typical real-time monitoring of air pollution gases, improve thesensitive material from the micro-nano structures start on the order of NO2and O3ppb sensitivity,detection limit and selective detection. After making a lot of basic research and pre-researchliterature, we discover that compared to several other common semiconductor oxide, In2O3hasexcellent gas sensing characteristics to NO2and O3. In2O3has greater conductivity, is conducive tobuilding simple sensing system.This paper aims to study the structure of In2O3hierarchical design, fabrication and gas sensingcharacteristics. By adjusting the hydrothermal synthesis conditions to regulate the morphology ofindium oxide. Mainly by change the reaction temperature, select the precipitating agent, optimizedprecipitant concentration of surfactant screening. Adjustment indium oxide’s morphology andmicro-nano structure by the above method, and then study the gas sensing characteristics associatedwith the law of the morphology and micro-nano structures. The main work includes the followingaspects:1. Hierarchieal In2O3nanomaterials included nanosheets, multi-level, flowerlike microspheres,star-shaped flowers and urchin-like with structure Uniform and high dispersity were synthesied bysimple hydrothermal and solvothermal methods.The as-synthesized samples were characterizedusing X-ray powder diffraction (XRD), scanning electron microscopy (SEM), transmission electronmicroscopy (TEM), Brunauer-Emmett-Teller (BET).2. The gas sensing properties of In2O3with different structure and morphology were measuredby mixing detected gas and air in static state. The test results showed that multi-level flowerlikeIn2O3have higher gas sensitivity than In2O3nanosheets.3. The star-shaped flower-like In2O3has high sensitivity and best stability to NO2at roomtemperature. Urchin-like In2O3has high sensitivity and fast response/recovery characteristics to O3.4. The results of testing gas sensing properties showed that In2O3gas sensor has lower power consumption or operation temperature.In this paper, micro-and nano-structures for different indium oxide growth mechanism andsensitive mechanisms were studied. Found that the morphology and micro-/nano-structure ismainly determined by the In2O3preparation temperature, surfactant type, amount and type ofprecipitant and solvent species. Sensitizing effect of micro-and nano-structures can be attributed toits large specific surface area and good permeability, because these structural features cansignificantly improve the recognition sensors and sensitive body efficiency.更多还原