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基于喷嘴电解的ELID磨削机理与实验研究

Study on Mechanism and Experiment of ELID Grinding Based on Nozzle Electrolysis

【作者】 唐昆

【导师】 尹韶辉;

【作者基本信息】 湖南大学 , 机械工程, 2013, 博士

【摘要】 近年来,随着光电信息、微机电、生物、医学等领域的飞速发展,其产品呈现明显的小型化与微型化的趋势,而硬质合金材料以其优良的机械性能在这些产品中获得了广泛的运用,其中一个典型的应用是光电产业中各种微小非球面透镜模压中使用的高精度硬质合金模具。因此,对于硬质合金材料微小非球面的超精密加工技术及装备的研究与开发具有重要的理论意义和工程应用价值。在线电解修整(Electrolytic In-process Dressing,ELID)镜面磨削适于硬质合金材料的高效、超精密加工,但是在加工微小非球面时,存在电极设置困难、砂轮易与工件发生干涉、易磨损砂轮柄、易产生振动等诸多问题。采用喷嘴电解ELID磨削方式,无需在加工区域安装电极,有效避免了上述缺陷。本文在国家自然科学基金资助项目(项目号:No.50675064)、国家高技术研究发展计划(863计划,项目号:2006AA42335)、国家“高档数控机床与基础制造装备”科技重大专项(项目号:2010ZX04001-151)、国际科技合作专项(项目号:2012DFG70640)等一系列项目的支持下,针对喷嘴电解ELID磨削技术开展了研究工作。本文的研究从喷嘴电解ELID磨削的基础研究、工艺研究和应用研究三个层面上展开,通过基础实验与理论分析相结合,力图对喷嘴电解ELID磨削的电解机理、工艺规律及其应用等方面进行全面、系统的分析。其中,基础研究部分主要进行喷嘴电解ELID磨削电解机理的研究,通过电解成膜过程与氧化膜作用机理的总结与分析,建立了不同电极材料和接线方式下的氧化膜厚度模型,并将仿真计算值与实测数据进行对比分析,其变化基本符合实际氧化膜生长的规律。工艺研究部分主要进行喷嘴电解ELID平面磨削工艺实验,工艺研究从单因素和多因素两个角度展开,单因素研究目的是总结工艺规律,为其后的多因素研究和应用研究打下基础;多因素研究则基于正交工艺实验及其结果,采用灰色系统理论,进行工艺参数优势因素分析、工艺参数优化、工艺参数预测等研究。在本文工艺实验范围内,基于灰色关联分析,得出了各影响因素对磨削力与表面粗糙度的影响程度;基于灰色决策,得出了正交实验的最优工艺参数组合,实现了参数优化与优选;基于灰色预测,建立了磨削力与表面粗糙度的灰色多变量组合预测模型,通过与传统多元线性回归预测模型的对比,验证了其预测精度。应用研究部分围绕应用喷嘴电解ELID超精密磨削技术的复合加工机床开发与微小非球面加工进行。机床开发包括机床总体设计与关键部件开发,微小非球面加工则采用所开发的机床,结合超精密斜轴镜面磨削,进行了微小非球面的加工实验,分析、总结了相关工艺规律。本文关于喷嘴电解ELID成膜机理与氧化膜厚度模型、喷嘴电解ELID平面磨削工艺参数规律与工艺参数研究、复合加工机床开发以及微小非球面的喷嘴电解ELID加工的研究,对于实现微小硬质合金材料零部件的高效、精密、优质和低损伤镜面加工,提供了理论和实验基础。同时,对于满足光电通讯、光学、信息等产业对超精密微小非球面光学模具的需求,带动超精密加工、纳米加工技术及其装备的发展具有一定的理论和工程应用价值。

【Abstract】 In recent years, with the rapid development of optoelectronic information, MEMS, biology and medicine, there exists obvious trend of miniaturization and micromation on products. Cemented carbide materials have been widely used in these products because of their excellent mechanical properties. A typical application is high precision cemented carbide mold for manufacturing micro aspheric lens on the optoelectronic industry. So, research and development of ultra-precision machining technology and equipment for micro aspheric of cemented carbides has important theoretical significance and engineering application value.ELID (Electrolytic In-process Dressing) mirror grinding is suitable for high efficiency and ultra precision machining of cemented carbides. But there also exist some problems on machining micro aspheric, such as difficulties for electrode setup, interference between electrode and workpiece, wear of wheel rod, and wheel vibration. Using nozzle electrolytic ELID grinding, it is no need to install electrode on machining area and above problems can be avoided. Supported by National Natural Science Foundation of China (No.50675064), National High Technology Research and Development Program of China (No.2006AA42335), National Science and Technology Major Projects (No.2010ZX04001-151), International Science&Technology Cooperation Program of China (No.2012DFG70640), this paper mainly focused on this technique, and research of the paper were carried out from basic, process and application research. Through fundamental experiments and theoretical analysis, it attempted to analyze systematically for electrolytic mechanism, technological rule and application of nozzle type ELID.Where, basic research focused on electrolytic mechanism of nozzle electrolytic ELID. Through analyzing and summarizing generation process and action mechanism of oxide film, film thickness models under different electrode materials and connection modes were established. Calculated values of thickness models were compared with measured ones, and their changes basically corresponded with rules of actual film generation.Process research focused on surface grinding of nozzle type ELID, and research were carried out from the perspectives of single and multiple factors. Single factor research was used for summarizing technological rule and laying a foundation for followed multiple factors research and application research. Multiple factors research was used for dominant factors analysis, process parameters optimization and prediction based on orthogonal experiment results and grey system theory. Using grey correlation analysis method, influence degree of different parameters on grinding force and surface roughness were determined. Using grey decision method, optimal combination of the parameters under certain conditions was obtained, and parameter optimization was realized. Using grey prediction method, grey multivariable combination models of grinding force and surface roughness were established and compared with traditional multiple linear regression model. The prediction effect and accuracy were also verified.Application research focused on the development of compound machine tool using nozzle electrolytic ELID and machining of micro aspheric. The former included overall design and key parts development of machine tool. Combined with ultra precision inclined mirror grinding, the latter carried out machining experiments of micro and aspheric surface using developed machine tool. Experimental results under different conditions were also analyzed and summarized.The research about formation mechanism and thickness models of oxide film, process parameters study, compound machine tool development, and micro aspheric machining provided theoretical and experimental basis for efficient, ultra-precision, high quality and low damage mirror machining of cemented carbide microstructures. Meanwhile, it had some theoretical and engineering value for the requirements of ultra-precision micro aspheric mold on photoelectric, optical and information industry, and development of ultra-precision, nano machining technologies and their equipments.

  • 【网络出版投稿人】 湖南大学
  • 【网络出版年期】2014年 10期
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