【作者】 刘永顺；

【导师】 吴一辉；

【作者基本信息】 中国科学院研究生院(长春光学精密机械与物理研究所) ， 机械制造及其自动， 2013， 博士

【摘要】 CD-like微流控芯片是一种简单实用的微流体平台，广泛应用于现场即时诊断、生物学、食品安全、制药、化学合成和环境检测等领域。本论文针对微流控芯片高深宽比复杂结构的加工与封装键合工艺，及典型微流控器件实验验证问题，采用弹性模具热压、激光烧蚀和表面改性等方法，实现了CD-like微流控芯片的多功能集成，低成本、批量化加工，以及关键微流控器件的性能验证。主要研究内容如下：（1）采用弹性模具热压的方法制作微流控芯片，有效的解决了高深宽比复杂结构的脱模问题，制得了表面平整、无缺陷的微流控芯片，芯片内结构最大深宽比达3:1，结构变形量小于5%的微流控芯片，并通过溶剂辅助键合的方式完成了微流控芯片的键合。（2）采用纳米粒子自组装，等离子体处理，表面活性剂处理等方法，开展亲水改性研究，并通过原子力显微镜，扫描电子显微镜和X射线光电子能谱仪对改性后的表面进行表征。通过改性机理的分析和接触角的测量，验证了改性方法的有效性。其中O2等离子体处理的方法可以快速有效的实现PMMA材料表面的亲水改性，通过2到3分钟的处理即可将PMMA表面接触角降为35o，且48小时后仍保持为45o。（3）对基于布局优化方法设计的被动微混合器开展实验研究。使用软光刻技术制备所设计的微混合器，并通过立体显微镜和共聚焦显微镜来评价其混合性能。通过比较微通道内有无所设计的混合结构的混合结果，证明了布局优化方法在提高微混合器混合性能上的有效性。通过数值仿真结果和具体的实验结果的对比，确认了所用布局优化方法的可靠性。（4）采用CO2激光加工的方法，制作CD-like微流控芯片。基于凸起及重铸物产生的机理，采用覆盖保护层的方法，有效的去除了通道边缘凸起及重铸物。采用叠层芯片的设计，将芯片结构按深度分层加工，然后通过粘接键合的方式，实现芯片的快速制作。通过探测芯片的设计与制作，实现了微流控芯片系统全功能的集成，并通过全血测试，验证了我们设计制作的CD-like微流控芯片系统的有效性。更多还原

【Abstract】 The CD (compack disk)-like microfluidic system is one type of simple andpractical microfluidic platforms. It has been widely used in point-of-care (POC)diagnostic, biology, food safety, pharmaceutics chemical synthesis and environmentalmonitoring. This thesis is focused on the process of manufacture and bonding formicrofluidic chips with high aspect ratio and complex structures, and the experimentalverification of the typical microfluidic devices, where the elastomeric mould basedhot embossing, laser ablation method and surface modification are used to achieve themulti-function integration, low-cost and massive production of the CD-likemicrofluidic chip, as well as the performance verification of the key microfluidicunits.The main contents of this thesis are listed as follows:Using the elastomeric mould based hot embossing, the problems on the high aspectratio and complex structures of the demoulding are solved effectively for thefabrication of microfluidic chip. Using this method, the surface-smooth, defect-freemicrofluidic chips can be obtained. The microstructure aspect ratio is up to3and thedeformation is less than5%. And through the solvent-assisted bonding method,bonding of microfluidic chips is achieved.The methods of self-assembly of nanoparticles, O2plasma treatment and surfacesilanization are used to carry out hydrophilic modification research. The modifiedsurfaces are characterized by Atomic force microscopy (AFM), scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS). And the modifiedmethod is verified by analyzing the mechanism of modification and the contact anglemeasurements. O2plasma treatment can achieve fast and efficient hydrophilicmodification of PMMA. After2-3minutes of O2plasma treatment, PMMA surfacecontact angle can be reduced to35o, and the contact angle remains45o after48hours.The passive micromixers designed using the layout optimization method areinvestigated experimentally. The designed micromixers are fabricated usingpolydimethylsiloxane soft photolithography techniques. The mixing performance isevaluated by stereoscopic and confocal microscopes. By comparing the mixingperformance of micromixers with layouts obtained using the layout optimizationmethod and that of micromixers without blocks, the effectiveness of the layoutoptimization method is verified in improving the mixing performance of micromixers.The reliability of the layout optimization method is confirmed by a comparison of thenumerical and experimental results.CO2laser ablation method is used to fabricate the CD-like microfluidic chip withthe PMMA substrate. On the basis of the formation mechanism of bulges, we apply acover layer on the top of PMMA to protect it during laser processing. And it is aneffective method to achieve a microfluidic chip without bulges at the rim of thechannels. Using the laminated design, the chip is layered according to the depth ofstructures. After the adhesive bonding process, rapid fabrication of the chip isachieved. Through the design and fabrication of detection chip, a fully integratedCD-like microfluidic system with multi functions is obtained. Through the wholeblood detection, we can verify the effectiveness of the manufactured CD-likemicrofluidic system which we design and fabricate.更多还原