【作者】 崔丹凤；

【导师】 薛晨阳；

【作者基本信息】 中北大学 ， 测试计量技术及仪器， 2014， 博士

【摘要】 芯片的发展趋势是电-光-电的光电混合集成，微光电子集成芯片是将集成电路与光子集成器件并为一体，实现具有实际价值的光电子集成系统。利用光子器件能够高密度并行操作以及快速的输入/输出能力，与电子器件结合起来后实现超快速大规模的集成系统。具有发射、调制、探测光信号以及放大、逻辑运算、智能控制电信号的功能。在光互连、光交换、光信息处理等方面具有重要的意义以及广泛的应用前景。在这个背景下基于绝缘体上硅（SOI）材料的微环谐振腔片上集成系统逐渐受到国内外学者的广泛关注。本文就是以目前国际最新成果作为指引，面向高Q值光学微环谐振腔片上集成系统，开展了集成光栅垂直耦合的光波导电光调制器的研究。主要是围绕光波导电光调制器，对其耦合单元及敏感单元分别进行了详细的研究，包括光栅耦合器、环形谐振器等。主要的研究内容归纳为以下几方面：（1）理论及设计方面：光栅耦合器和环形谐振器分别作为电光调制器的耦合单元和敏感单元，对三者的相互关系以及基本理论进行了深入的研究；利用FDTD、BPM以及Rsoft光学仿真软件分别对垂直光栅耦合器、环形谐振器的关键参数进行了模拟仿真分析，深入研究了光栅刻蚀深度、周期及光束的入射角度等参数对耦合性能的影响，以及波导宽度、弯曲半径和耦合间距等参数与环形谐振器谐振性能之间的关系，设计了一种新型的四环级联结构谐振器，可以实现谐振峰的分裂；利用SentaurusTCAD软件对二极管特性进行了仿真分析，最终确定光波导电光调制器的结构参数以及工艺参数。（2）加工制备方面：利用电子束曝光及感应耦合等离子体刻蚀工艺相结合的方式完成了光栅耦合器和环形谐振器的制备。根据设计的掺杂浓度及掺杂深度，利用离子注入法完成了电光调制器P-I-N二极管的制备，并与PCB版接连后完成调制器的整体结构制备。（3）测试方面：首先对端面耦合与垂直耦合方式进行了对比效率实验，经过计算分析实验结果可以得到端面耦合的耦合效率为12%，光栅耦合器添加增透膜后的耦合效率可以达到26%，并对光纤-光栅耦合区域进行了固化封装，测试结果发现可以较大程度地提高器件的稳定性，实现了高效且稳定的耦合单元；测试发现设计的新型四环级联结构的谐振器不但可以实现光的延迟，还能保证较高的品质因数（Q=0.72×105），并且对温度有较好的敏感度0.16nm/℃。在验证了具有较好的光耦合单元及性能较好的敏感单元后，搭建调制器测试平台，分别对调制器的静态特性和动态特性进行了测试。测试结果实现了光谱曲线中谐振峰的偏移，动态测试中，目前可获得30MHz的稳定输出信号。更多还原

【Abstract】 Hybrid integrated of electricity-optics-electricity is the development of chip. MEMSintegrated chip constitute optoelectronic integrated system with practical value. Takes fulladvantage of high-density integrated photonic devices operating in parallel andhigh-speed optical input/output capability, skillfully combined with the photon functionsand electronic functions, constitute a high-speed and large scale integrated systems withtransmit, modulation, detection optical signal and amplify, logical, intelligent controlelectrical signals. It has great significance and broad prospect in optical interconnects,optical switching, optical information processing. Micro-ring resonator integrated systemwhich fabricated on silicon-on-insulator (SOI) gradually attracted widespread attentionfrom domestic and international scholars.This dissertation based on the latest international achievements as guidelines, forhigh-Q optical micro-ring resonator chip integrated system carried out a study ofsilicon-based optical waveguide several discrete devices, which is mainly around thewaveguide electro-optic modulator including the grating couplers, ring resonators andet.al. The main contents are summarized in the following aspects:(1) Theory and design: Grating coupler and ring resonator look as coupling unit andsensitive unit of electro-optic modulator respectively and do the thorough research onthese basic theories. Grating coupler and ring resonator are simulated about groove depthof grating, period, the angle of incidence by optical simulation software FDTD.Meanwhile, key parameters of waveguide width, bend radius and the gap betweenwaveguide and resonator are investigated. A novel four-ring cascade structure is designed.Resonance peaks split can be realized. Simulation analysis of the electro-optic effect andthe frequency modulation is performed by simulation software Sentaurus TCAD todetermine the final modulator parameters of structures and technics.(2)Preparation process: The preparation of grating coupler and ring resonator isfabricated with electron beam lithography and inductively coupled plasma etchingprocess. According to the design of the doping concentration and doping depth, the modulator is used of ion implantation to complete the preparation of electro-opticmodulator PIN diode, and the final structure of the modulator was prepared after a seriesof PCB versions connecting.(3)Testing: compared with the experiments of end-face coupling and verticalcoupling, the result indicate that the coupling efficiency of end-face coupling method isaround12%,while the coupling efficiency of grating coupler with antireflective coating isaround26%. The encapsulation experiment of fiber-grating is carried out, and theefficiency and stability of the device is improved considerably. In terms of characteristicsof resonator, four-ring structure not only obtains a high quality factor with72,000, opticaldelay but also can achieve a nice temperature sensitivity0.16nm/℃. The testing platformfor modulator after verifying a better performance of optical coupler and a sensitive unitis set up. Static and dynamic characteristics of the modulator are tested, respectively. Theshift of the resonance peak in spectral curve is achieved by experiments. The stableoutput signal of30MHz is achieved in dynamics tests.更多还原