【作者】 黄雷；

【导师】 马宏；

【作者基本信息】 长春理工大学 ， 光学工程， 2013， 博士

【摘要】 随着科学技术的进步,激光干涉测量技术在各个领域都得到相当广泛的应用。方面因为微电子、微机械、微光学和现代超精密机械加工工业提出了愈来愈高的测量精度需求并同时要求更大的量程,而其它方法难于胜任,只有激光干涉测量技术可以在大量程内达到高精度的测量准确度；另一方面当代激光干涉测量技术自身具有灵敏度高、量程大及可以适应恶劣环境等优点,同时光波又具有直接对米进行定义且容易溯源的特点,因而在现代工业中得到了非常广泛的应用。目前对于单频激光干涉测量技术的研究主要集中于两个方面：一是在计量实验室环境下的对小量程的更高精度测量及分辨率(纳米及亚纳米)测试技术的研究；二是在一般环境下使干涉仪的抗干扰性能更好、可靠性更佳、自动化及集成化程度更高和允许测量速度更高的测试系统的研究。对于以上内容的研究主要归结为以下三个方面：(1)抗干扰性能更强、精度更高的频率稳定方法；(2)背景噪声处理技术及信号处理技术等；(3)可减小或补偿非线性误差,对加工及安装精度要求不苛刻的光路结构及对折射率的影响进行补偿等。改善单频激光干涉仪存在的这些弊端,增强其抗干扰能力,优化其非线性误差,不仅可以使其向纳米计量领域发展,还可使单频激光干涉仪走出实验室,跨入工厂的生产车间,从而扩展其应用范围,使其适应现代工业化生产对于低成本、高准确度的要求,以满足科研及生产的需求。所以,对于单频激光干涉系统的研究具有非常重要的理论价值及实际意义。本课题研究了单频激光干涉系统的原理、结构、数据处理方法及其优化调校,在此基础上应用该系统研制了可变光程的激光测长机,并应用该激光测长机对量块在不同姿态下的长度变化量进行了测量。(1)针对传统的两路信号单频激光干涉系统存在抗干扰能力差,系统稳定性不佳的缺点,本文提出了四路信号单频激光干涉系统。该系统较双频系统结构简单,减小了非线性误差来源,通过光路的设计和采用偏振分光镜,使得反射光完全不返回激光器,从而具有光隔离器的作用。同时,四路信号系统具有良好的对称性,可以有效抑制共模噪声的产生,提升单频激光干涉系统的抗干扰能力和系统的稳定性。(2)针对该系统信号的特点,提出四路信号预处理方法。其主要实现的功能包括：光电转换,抗干扰自适应系统,模数转换和非线性误差最小二乘拟和算法等几部分。重点分析了自适应系统并提出非线性误差最小二乘拟和算法,并进行了相关的仿真实验。(3)研究了单频激光干涉系统非线性误差的调校方法,总结了调整光路的基本原则。分析了光学元件优化调校对单频激光干涉系统的性能提升的影响。在此基础提出了最优控制优化调校方法,并通过测量实验验证了最优控制优化调校方法可以使该系统获得较为理想的性能指标。(4)建立了干涉系统的噪声数学模型,研制了自适应系统,提高仪器的抗干扰能力和测量精度。将激光干涉仪应用于测量领域以来,各国学者都对其发展倾注了很多心血,使其得到飞速发展。激光干涉理论的不断丰富和发展,使得各种类型的干涉仪不断推陈出新,且每种激光干涉仪都有其各自的应用领域。论文系统性的研究了激光干涉仪的发展进程及其应用范围,创新性的采用了四路信号系统,并应用四路信号预处理方法、自适应系统抗干扰方法和针对该系统的优化调校方法,来有效提升单频激光干涉系统的性能,使其可以在更广泛的范围内得到应用。实验结果表明,该单频激光干涉系统可有效滤除环境噪声信号,可使系统信噪比达到75dB。同时,利用该系统研制的激光测长机测量准确度达到±(0.3μm+1.5×10-6L),测量重复性为0.2μm。更多还原

【Abstract】 With the advancement of science and technology, laser interferometer measurement technology has been widely applied in various fields. On the one hand, because the microelectronics, micro-mechanical, micro-optics and modern ultra-precision machinery processing industry bring forward increasingly high measurement accuracy requirements. At the same time, they require a greater measurement range. But the other methods are difficult to competent. This requirements of large measurement range and high precision measurement accuracy can be achieved by laser interferometer only. Moreover, modern laser interferometer measurement technology has the advantage of high sensitivity, large measurement range and adapting the harsh environment. Simultaneously, the "meter" is defined by optical wave directly which is easily traced to the source, so it has been widely range of applications in modern industrial.Currently, the research of laser interferometer measurement technology is mainly focused on two aspects:One aspect is the research of small range, high precision measurement and nanometer resolution in the metrology laboratory environment. On the other aspect, the research focus to be better anti-jamming performance, better reliability, higher degree of automation and measurement speed. The above content is mainly attributed to three aspects:(l)The frequency stabilization method of stronger anti-interference performance;(2)Background noise processing technology and signal processing techniques etc.(3)The method of reducing or compensating nonlinearity error, lower the structure requirements of the light path and compensating the influence of index of refraction etc.Improve existence drawbacks of the single frequency laser interferometer, enhance its anti-jamming capability, optimize the nonlinear error, not only make it develop into the field of nano-metrology, and this research can also make it go out the lab, expand its scope of application. It is adaptted them to modern industrial production requirements for low-cost, high accuracy. So, the study of single frequency laser interferometer system has a very important theoretical value and practical significance.This issue mainly study the principle, structure, data processing method and its optimization adjustment for single frequency laser interferometer system.We develop laser measuring machine of adjustable optical path, and apply the research of laser interferometer to measure length of gauge blocks.(1)There are some defects of anti-jamming capability and poor stability for traditional two channels signal single frequency laser interferometer system. Four channels signal system is advanced by this article. The system has more simpler structure and smaller nonlinearity error than dual frequency laser interferometer system. By designing the light path and adopting polarizing beam splitter(PBS), there are no reflected light return to laser source. So the system has the function of opto-isolated. At the same time, four channels signal system has favorable symmetry capability. The source of common-mode noise has been controlled. The capability of anti-jamming and stability is improved.(2)Pretreatment of four channels signal system is advanced for single frequency laser interferometer system. The main features include:photoelectric conversion system, anti-jamming self-adaptation system, analog-to-digital conversion part, least squares algorithm of nonlinearity error etc. The article mainly researched the anti-jamming self-adaptation system and least squares algorithm for ellipse fitting, and the simulation experiment is made.(3)The optimization adjustment method to improve single-frequency laser interferometer is advanced. The method to adjust light path is summarized. Optical elements are adjusted to enhance the system performance. Consequently, the structure and stability are optimized by decrease the nonlinearity, and the accuracy is advanced also.(4)Noise mathematical model for the system is founded. The experimental results show that, the noise of the signal can be disposed by this anti-jamming self-adaptation system. Accordingly, high-precision tracking to the direct current component is achieved.Laser interferometer has been applied to the field of measurement for several years, scholars from various countries have devoted a lot of time and effort to its development,and the system has been rapid development. Along with laser interferometer theory is enriched and developed, types of interferometer continue to appear. Each kind of laser interferometer has its own applications. The article has research the development process and its scope of application of the laser interferometer. Four channels signal system is adopted by the study inventively. At the same time, pretreatment of four channels signal system, anti-jamming self-adaptation system and optimization adjustment method are adopted to improve the performance of the system. So that single frequency laser interferometer system can be applied in a broader range. The experimental results show that, the noise of the signal can be disposed by this system, system signal-to-noise achieve to75dBo The accuracy of laser measuring machine which installed by single frequency laser interferometer system achieves to±(0.3μm+1.5×10-6L), and the measurement reproducibility is0.2μm.更多还原