【作者】 朱峰；

【导师】 孙洪波；

【作者基本信息】 吉林大学 ， 微电子与固体电子学， 2013， 博士

【摘要】 随着光电子技术的飞速发展以及1550nm波长的低损耗单模光纤的诞生，光纤通信和光纤传感技术已经成为通信及传感领域的最热门研究技术，特别是光纤传感技术已广泛应用于航空航天、石油勘探开采和生物医学等领域。这类器件不仅具有高探测灵敏度而且可实现高温、高湿及高电磁辐射等苛刻环境条件长期工作。光纤传感器相对于电类传感的另一优势是可用于分布式传感，这种技术是物联网技术的重要组成部分。锥形光纤尺寸小、制备工艺简单，对温度、压力、折射率等具有超高的灵敏度，不仅广泛应用于医学、近场光学显微镜以及光孤子通信，而且还可以作为高效传感元件,其特性及其应用愈来愈受到重视。本论文对锥结构光纤传感器的制备、传感特性以及应用做了深入系统的研究，工作主要有以下几方面：1.利用电弧放电熔融拉锥技术，制作了一种紧凑新颖的光纤模式干涉仪传感探头。干涉仪的尺寸可以通过电弧放电电流的大小、熔融拉锥时间，以及熔接机电机的移动速度来控制，实验制作出最小有效传感区域长度仅为约310微米，并证实这种反射型干涉仪的反射光谱依赖于光纤探头的尺寸和形貌。反射型光纤锥模式干涉仪还具有优良的高温性能和机械稳定性，我们利用不同干涉衰减峰对环境微扰的不同响应，实现了在温度高达1000℃的苛刻环境中横向负载和高温的同时测量。2.采用偏芯熔接法制备了基于双J型细纤芯锥结构的光纤马赫增德尔干涉仪（DJTC），测试了其对温度和环境折射率反映特性，并利用这种结构实现了温度和折射率同时传感。同时，对于此种结构，理论上详细的分析了其工作机制以及双参数传感的可行性，并在实验上获得了和理论一致的实验数据，给出了温度和折射率同时传感的传输矩阵。3.理论上，详细阐述和分析了电光探测技术和逆压电效应增强电压灵敏度的原理。实验上，摸索了ZnO多晶薄膜的磁控溅射生长条件，并采用磁控溅射方法，制备出基于ZnO薄膜的锥形光纤电场传感器。利用其较大的压电性能，提高了其在电光探测中的电压灵敏度，特别是在逆压电共振频率附近，提高电压灵敏度两个量级以上。更多还原

【Abstract】 With the rapid development of Optoelectronic Technology and theemergence of1550nm low loss single-mode optical fiber, technology ofoptical fiber communication and optical fiber sensing has become themost popular research technical communication and sensing fields.And especially, optical fiber sensing technology has been Widely usedin aerospace, oil exploration and exploitation and biomedical fields.It not only has high detection sensitivity, but also can realize tolong-term work at High temperature, high humidity and highelectromagnetic radiation and other harsh environmental conditions.Relative to the Electrical sensing technology, another advantage ofoptical fiber sensing technology is that it can be used to the distributedsensor system. This distributed sensor system is an important part of theInternet of things technology.Tapered fiber has small size and simple preparation process. It hasultra high sensitivity to temperature, pressure, refractive index, and notonly was widely used in medicine, near field optical microscopy andoptical soliton communication, but also was used as efficient sensingelement. The characteristic and application of tapered fiber have gotmore and more attention. This paper dose an in-depth study in the constructure of optical fibersensor preparation, sensor characteristics and application. The workmainly in the following aspects:A compact fiber tip modal interferometer (FTMI) based ontwo-wave interference has been demonstrated.Its fabrication process is very simple, just involving fiber taperingby a fusion splicer. The effective sensing area of the FTMI has a smalllength of～310μm.The interference spectra of the fiber tips depend on the size andprofile of the fiber sensor.The FTMI has a good mechanical strength and high-temperaturestability. And different attenuation peaks have different response to theenvironment changes.It can be used for high-temperature and transverse load sensingsimultaneously in a harsh environment when two different attenuationpeaks are chosen to be monitored.An single-mode-fiber Mach–Zehnder interferometer (MZI) bycascading two “double-J” shape thinned core structures forsimultaneous measurement of temperature and surroundingrefractive index (SRI) has been achieved.The “double-J” shape thinned core structure is fabricated by fusionsplicing two sections of single-mode fibers with large lateral offset.At the same time, we analyses the work mechanism and thefeasibility in detail to sensor to double parameters. The experimentalresults and the theoretical results are accordant. The relationshipbetween these variables is expressed in the form of matrix. Zinc oxide films prepared by magnetron sputtering are introducedto the electro-optical detection to improve the voltage sensitivity. Withthe help of large piezoelectric effect, ZnO films make up for thedeficiency of the low electro-optical coeffcient.In this paper, we preparated tiper fiber electric field sensor based onZinc oxide films. We illustrated the mechanism of piezo-inducedenhancements, and measured the electric signals on the line of coplanarwaveguides.This method breaks through the limit of material species foropto-electronically responsive sensing, and shows promisingapplications in optical detection.更多还原