【作者】 阳波；

【导师】 段吉安；

【作者基本信息】 中南大学 ， 机械工程， 2013， 博士

【摘要】 阵列波导器件是支撑21世纪光纤通信高速发展的核心光电子器件。阵列波导器件的耦合封装是利用全空间6自由度的运动平台,将波导芯片与输入、输出阵列光纤进行光学对准耦合并固接,获得器件完整功能的制造过程。一方面,阵列波导器件的耦合封装是亚微米级定位精度、全空间、多通道的光学对准,任一通道的对准精度不足都将导致阵列波导器件信号传输或转换功能丧失,使得整个器件成为废品；另一方面,结合面固接强度与应力分布直接决定了耦合界面的附加微位移和器件的可靠性。阵列波导器件的耦合封装融合了导波光学、集成光学、控制科学、微细加工、材料科学的相关理论和前沿技术,是阵列波导器件制造的关键技术之一,成为制约集成光电子器件高速发展的技术瓶颈。论文围绕阵列波导器件的模场耦合理论、空间姿态检测与姿态对准技术、阵列波导器件多通道模场耦合技术以及其对准精度展开研究,主要研究内容和相应的结论如下：(1)基于电磁学波动方程和弱导条件研究了光纤和矩形波导的基模条件、模场分布近似误差和空间位错的模场耦合规律,分析了波长影响模场耦合损耗的规律,建立了模场耦合的波长相关性模型。模场耦合的波长相关性研究及其有限差分光束传输仿真实验表明,空间位错(轴间偏移、轴向间隙和轴间倾斜)是影响模场耦合损耗的主要原因,且波长影响耦合损耗的大小。(2)耦合组件之间的空间位姿运动是实现阵列波导器件耦合封装的前提条件。基于机构运动学D-H方程研究了阵列波导器件六维对准平台各运动机构与末端夹具位姿的对应关系,建立了六维对准平台的空间位姿运动方程；研究了旋转运动导致末端夹具偏移的规律,提出了保持末端夹具位置不动的旋转控制方程和维持平台旋转同心的D-H条件,为阵列波导器件模场耦合的空间位姿调整以及对准平台的优化设计提供理论指导。(3)耦合界面的空间姿态对准是减少轴间倾斜和轴向间隙的重要方法。通过分析二维平面矢量与三维立体矢量的空间几何关系,建立了双目正交成像的三维坐标系重构模型,提出了两种极角检测误差小于0.01度的直线检测算法,实现了阵列波导器件三维姿态的自动检测；以姿态检测为反馈,提出了耦合界面姿态对准的闭环控制方法,对准角度误差小于0.1度；基于坐标矩阵变换和空间几何关系,研究了直线检测误差和三维重构误差对三维姿态检测精度的影响,建立了三维姿态检测的误差模型,当三维重构误差足够小时,三维姿态的检测误差与二维直线的检测误差相当。(4)阵列波导器件耦合平面内的多通道模场耦合是减少轴间偏移,实现多通道精确对准的关键。基于耦合损耗函数的简化和多通道耦合损耗偏差的几何关系,提出了耦合模型拟合的单通道模场耦合算法和双通道耦合极值同步检测的通道均衡算法,分别实现了单通道耦合损耗小于O.15dB,双通道模场耦合损耗偏差小于O.15dB；研究了阵列光纤的制造误差、单通道对准误差和双通道耦合均衡的角度误差对多通道模场耦合的影响规律,建立了它们之间的理论模型,三种误差以相同的效果同时影响阵列波导器件的多通道模场耦合损耗。更多还原

【Abstract】 Arrayed waveguide devices (AWD) have become the core of the integrated optoelectronic device, supporting the rapid development of optical fiber communication in the21st century. Packaging of AWDs is an essential manufacuring process to acquire their complete optical functions, in which the devices bonded firmly together with some kind of epoxy after a prcecise mode field coupling of the waveguide chip with the input&output fiber arrays on a flexible movement platform with6degrees of freedom in full space. On one hand, the coupling is an optical alignment with submicron-level positioning accuracy, whole space and multichannel. Insufficiency of the alignment accuracy of any channel will result in the fall of AWD’s signal transmission or conversion function, and even make the whole device a waste; on the other hand, the junction intensity and the stress distribution of AWD inevitably cause the micrometric displacement on coupling interface in a complicated enviroment, and then degrate the reliability of the devices. Packaging of AWD, which is the key technology to fabricate AWD and become a technical bottleneck to hinder the developing of integrated optoelectronic devices, is a blend of multiple theories and the21st cutting-edge technologies that involve guided wave optics, integrated optics, control science, microfabrication and materials science.This paper developed some research focusing on mode field coupling theory, space gesture detection, pose alignment technology, multi-channel mode field coupling technology and accuracy analysis of the alignment of arrayed waveguide devices. The main research contents as well as the corresponding results are listed as follows:(1) Based on electromagnetism wave equation and weak guide conditions, this paper discussed the error distribution of some kinds of mode field distributions and the mode field coupling loss caused by spatial deviation according to fundamental mode conditions of fiber and rectangular waveguide, and then analyzed the discipline of mode field coupling loss under the combined action of wavelength and those spatial deviation, therefore this paper proposed a new wavelength correlation model of mode field coupling. Studies of mode field coupling loss and simulation experiments by the finite difference beam propagation were made effectviely and their results indicated that spatial deviation (such as axial deviation, axial clearance and axial decline) are some of the most important causes to induce mode field coupling loss, and meanwhile wavelength alter the amount of coupling loss as well. (2) The spatial pose movements between the coupling components are the precondition for AWD’s coupling and packaging. Based on kinematics of mechanism D-H equation, this paper presented the spatial pose transformation equation of6-DOF platform after making search of relationships and regularities between the pose of the terminal fixture and those independent movement mechanisms, and also proposed a rotary control equation as well as a D-H condition which limit the deviation of terminal coordinate and acquire concentric rotation. The novel model of a rotary control and its conclusion will provide theoretical guidance for the spatial pose alignment of mode field coupling and the optimization of the6-DOF platform.(3) After analysis of the spatial geometrical relationship between2D vector and3D vector, this paper presented a reconstruction model for3D system with binocular orthogonal image system and two kinds of line detection algorithms with polar angle detection error less than0.01degree; based on the feedback of pose detection, this paper presented a closed-loop control method for the pose alignment with angle alignment error less than0.1degree; and based on the coordinate matrix transformation and the spatial geometry, the paper studied the accuracy of3D pose detection caused by line detection error and three-dimensional reconstruction error, and then built an error model of3D pose detection, which drew a conclusion that the error of3D pose detection is similar to that of2D line when the error of3D reconstruction is small enough.(4) The multichannel coupling in the coupling plane is the key to reduce axial deviation and achieve multichannel accurate alignment. Based on the simplification of coupling loss function and geometric deviation of the multichannel coupling, this paper proposed a kind of single-channel mode field coupling algorithm on model fitting methods and a kind of multiple channels equalization algorithm according to the coupling extremum of dual channels, which achieved single-channel coupling loss less than0.15dB and deviation of mode field coupling loss of2channels less than0.15dB respectively, and this paper also discussed the error distribution of the multichannel coupling loss caused by the manufacturing error, single-channel alignment error and the angle error of dual channels equalization and then built a theoretical model to analysize them. Theoretical analysis and numerical calculation showed that three kinds of the errors affect the multichannel mode field coupling losses simultaneously with the same effects.更多还原