【作者】 程伶俐；

【导师】 余晓芬；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2011， 博士

【摘要】 随着MEMS（微机电系统）技术的发展，微芯片、微光学元件、微机械零件以及其它各种微器件不断出现，它们的几何尺寸多在微米至亚微米量级，测量精度及分辨率要求在纳米量级，近年还出现了尺寸在数十毫米且精度要求高于数十纳米的器件。要对上述这些器件进行精密加工和测量，需要发展微/纳米加工和测量技术，因此要研究能实现驱动分辨率和定位精度在纳米量级范围内的大行程工作台和微动工作台。本学位论文选题来源于：①国家自然科学基金资助项目：纳米三坐标测量机关键技术的研究；②国家自然科学基金重大国际合作项目：纳米三维测量关键技术与系统研究；③国家自然科学基金资助项目：基于并行像散共焦探测原理的微结构三维形貌测量基础研究。论文的任务是纳米工作台的机械结构设计，主要研究工作和创新点如下：1.大行程纳米工作台机械结构设计根据大行程纳米工作台设计要求研究了整体结构设计方案。设计了二维工作台共面结构和三维工作台共点结构，大大减小了阿贝误差对测量的影响。研究了创新型的高精度低摩擦导向模式，解决了滑动导轨慢速驱动时存在的爬行问题，满足了纳米驱动分辨率的要求。通过结构设计隔离了驱动电机振动等对工作台的干扰。2.大行程纳米工作台结构优化设计二维工作台结构研究中，对高精度低摩擦复合导轨磁铁副的结构参数进行了优化设计，构建了均匀稳定的磁力场；对工作台进行了力平衡结构设计，减小了寄生转矩对定位精度的影响。三维工作台结构研究中，进行了圆筒型永磁直线同步电机的偏心安装结构设计，抑制和吸收了电磁扰动引起的推力波动；在三维运动轴上增加了磁流变液阻尼装置，减弱了各种力扰动的影响；建立了运动系统的动态模型，对工作台结构参数进行了优化设计。3.大行程纳米工作台实验研究及标定实验。实验研究了外加阻尼力、工作台负载、电机驱动速度等对工作台定位性能的影响,为制定最佳实验方案提供了依据；对工作台进行了驱动分辨率、直线度、定位精度等重要特性指标的标定实验,检验了结构设计的正确性及结构优化设计的效果。实验结果表明，大行程二维纳米工作台和三维纳米工作台的驱动分辨率均实现了目标要求。4.纳米微动工作台结构研究。提出了一种新型的六自由度纳米微动工作台结构形式，同时满足了结构简单、体积小、控制简便、运动耦合少的设计要求。通过建立微动台运动数学模型，合理确定了工作台结构参数。研究了一种创新型的压电陶瓷驱动器封装装夹方式（已申请1项国家发明专利），优化设计了柔性铰链导向机构的结构参数。更多还原

【Abstract】 With the development of the MEMS (micro electromechanical systems)technology, applications of micro-chips, micro-optical components,micro-mechanical parts and other kinds of micro devices are increasing, which arefrom micron to submicron in size, nanometer scale in measurement accuracy andresolution. In recent years, the devices, which are tens of millimeters in size andhigher than tens of nanometers in accuracy, are also appearing. To machine andmeasure these precision devices, the micro/nano machining and measuringtechniques are needed. Therefore, study on the nano-motion table with large travelranges (displacement from several to hundreds millimeters) and micro-travel ranges(displacement less than100μm) is becoming more and more important in the areas ofprecision machining and measurement.The dissertation is based on three research projects sponsored by the NationalNatural Science Foundation, entitled “the key technology research of Nano-CMM”,“the key technology and system research of3-D measurement system”, and“research on measuring3D surface topography of microstructure based on theprinciple of parallel astigmatism confocal detection”, respectively.This thesis focus on the mechanical structure of nano-motion table, the mainresearch works and its originality can be summarized as follows:(1)The mechanical design of nano-motion table with large travel rangesAccording to the design requirements of the nano-motion table with large travelranges, the overall table structure has been designed. A coplanar structure for thetwo-dimensional table and a stigmatic structure for the three-dimensional table havebeen developed, which greatly reduce the Abbe error. An innovative high-precisionand low friction orientation has been researched, which solves the crawl problem ofthe sliding rail when the table is slowly driven, and meets the requirement of theresolution of nano-motion scale. Through mechanical designing, the vibration of thedrive motor has been isolated from the table.(2) The structural optimization of nano-motion table with large travel rangesFor2-DOF nano-motion table, two innovative tasks have been accomplished:①the magnet vice structure parameters of the high precision and low frictioncomposite rail has been optimized, which builds a uniform and stable magneticfield；②a force balance system has been designed to reduce the parasitic torque onthe positioning accuracy of the table. For3-DOF nano-motion table, three improvements have been made:①eccentric installation of the tubular permanentmagnet linear synchronous motor has been designed, which inhibits and absorbs thethrust fluctuation caused by electromagnetic disturbance;②MRF dampers have beeninstalled in the three-dimensional motion axis, which reduce the impact of variouspower disturbances;③a dynamic model of motion system has been established andused for optimizing the parameters of the table.(3)Experimental investigation and calibration of nano-motion table with largetravel rangesThe effect of external damping force, table load and the motor driving speed onthe table positioning performance have been investigated, which provide a basis formaking the best experimental program; the resolution, straightness, positioningaccuracy and other important performance of the nano table have been calibrated,which proves the correctness of the design and structure optimization results. Theexperimental results show that the resolutions of the2-DOF and3-DOF nano-motiontable with large travel ranges have met the objectives and requirements.(4)The structure study on nano-motion table with micro-travel rangesThrough studying the overall structure of the6-DOF nano-motion table withmicro-travel ranges, the design goals including simple structure, small size, easily controland motion of less coupling have been achieved. A mathematical model of micro table hasbeen established and the structural parameters of the table have been determined. Anunencapsulated piezoelectric actuator has been packaged, and the structuralparameters of the flexible hinges have been designed. A national invention patentbased on above developments has been applied.更多还原