【作者】 代刚；

【导师】 邵贝贝； 苏伟；

【作者基本信息】 清华大学 ， 核科学与技术， 2011， 博士

【摘要】 为了首次在国内将MEMS-IMU应用在某战术级项目的姿态测量上，本文研究了在较为复杂的实用环境下，MEMS-IMU及其中的MEMS惯性传感器的输出误差的机理及相应的补偿方法。由于组成MEMS-IMU的MEMS惯性传感器的工作方式与其它类型的传感器大不相同，因此开展的MEMS惯性传感器在实验条件下的误差机理研究，是补偿方法的依据。首先，本文介绍了MEMS-IMU的工作原理和研制的战术级精度MEMS-IMU样机，分析并测量了样机的各项误差，包括MEMS惯性传感器的误差与集成产生的误差，评估了在实验条件下各项误差导致的导航解算误差的大小，得到了本文的研究重点是传感器温度漂移误差与加速度灵敏度误差的抑制。然后，本文提出了用以分析微结构误差导致的输出误差的统计参数法，建立了微传感器输出误差与制造过程产生的尺寸误差的联系，可以用以预测给定制造工艺条件下传感器所能达到的误差指标。接着在考虑加工工艺步骤的基础上，分析了微加速度计温度漂移的各种可能的原因，重点分析了硅玻璃热膨胀系数失配导致的相对位移与微加速度计加工误差导致的U形梁刚度不对称综合作用的贡献，并对温度漂移的进行解析计算；建立了微加速度计结构-静电-温度多物理场耦合有限元模型并进行了温度漂移的分析仿真，还进行了温度实验，并对分析，仿真和实验的结果进行了对比验证。接着，本文分析了产生双极解耦微陀螺加速度灵敏度与温度漂移可能的原因，重点分析了在驱动力和惯性力作用下加工随机误差导致微陀螺U形梁刚度不一致使得中心质量块发生了扭转，使检测电容差不为零的现象。建立了微陀螺结构有限元模型，得到了微陀螺温度漂移与加速度灵敏度的仿真结果，再通过温度实验与离心实验对误差项的分析，仿真和实验结果进行对比验证。最后，本文针对于使用中的具体问题展开了实验研究。提出了一种MEMS-IMU整机标定补偿方法。提出了使用磁场传感器测量超过微陀螺量程的角速率的方法。介绍了进行的飞行实验，并结合飞行实验的结果验证了本文中提出的整机误差标定补偿方法，磁场测量大角速率的方法，温度漂移误差和加速度灵敏度误差的补偿方法。实验取得圆满成功，达到要求的姿态测量精度。更多还原

【Abstract】 In order to implement the attitude measurement of the tactical ballistic trajectoryweapon, this dissertation focused on the research of the Micro-Electro-MechanicalSystems Inertial Measurement Unit(MEMS-IMU) error mechanism and correspondingcompensation method under the actual combination condition, including large angle rate,acceleration and temperature variation. Since the principal of the MEMS inertial sensorwhich comprised the MEMS-IMU are different from the other kinds of inertial sensors,the traditional compensation models are not optimized. The research on theMEMS-IMU error mechanism is the basis of the compensation method.This dissertation firstly introduced the principle of MEMS-IMU and the fabricatedtactical grade accuracy MEMS-IMU. The errors of the MEMS-IMU were estimatedunder the certain condition to provide the importance of certain errors includingtemperature drift and g sensitivity. Part of this dissertation would focus on theinterpretation of these errors.Then, this dissertation proposed a statistical parameter method to analyze thesensor output error caused by the manufactured dimension variation. It connected thevery beginning of the sensor fabrication and output of the sensor. It also can predict therange of the output error with the certain fabrication process. The possibleinterpretations of the accelerometer thermal drift based on the width parameters and thefabrication process were analyzed. The contribution of the stiffness asymmetry of theU-springs of the structure and relative displacement caused by the mismatch in thermalexpansion coefficients between the Pyrex glass substrate and heavily boron-dopedsilicon structure was investigated, modeled and simulated. The analytical model andmultiphysics simulation model were established to calculate and simulate the thermaldrift. The temperature experiments were carried out to compare and verify the analysisresult.Next, this dissertation analyzed the possible error mechanism of the thermal driftand g-sensitivity of doubly decoupled MEMS gyroscope. The phenomenon of thenon-zero detection capacity difference caused by the twist of the center mass, whichwas caused by the acceleration force and driven force and the U-spring width variation,was mainly investigated. The finite element model of the gyroscope’s structure was established and simulated. The simulation result of zero rate output, thermal drift andg-sensitivity were given and compared with the analysis value and experiment result.Furthermore, this dissertation proposed a magnetometer aid over-range rotationrate combination measurement method which can compensate the large angle rate errorcaused by the gyroscope. The overall MEMS-IMU calibration method was proposedbased on the analysis of the error principle above. A compensation method for thecalibration of the MEMS-IMU was also designed to improve the performance ofMEMS-IMU.Finally, this dissertation introduced the successful flight experiment which verifiedthe entire work of this dissertation. The overall compensation method, themagnetometer aid method and the analysis of the error of MEMS-IMU were verified bythis experiment.更多还原