【作者】 唐旭晖；

【导师】 王玉田；

【作者基本信息】 燕山大学 ， 仪器科学与技术， 2012， 博士

【摘要】 本文在对国内外压电加速度计研发现状充分调研的基础上，应用有限元分析方法建立了压电加速度计典型结构的有限元模型。仿真与实验研究验证了有限元仿真在压电传感器研发中的可行性和有效性。在压电加速度计中，压电元件将机械振动产生的应力转换成电荷输出，通常以单自由度弹簧质量系统作为其解析模型，利用压电学的机电耦合理论分析压电结构的静动态性能。通过解析—实验验证相结合的方法完成性能指标的修正。有限元法已经成为一种高效、准确、经济的设计手段。以变分原理和剖分插值为基础，将连续的无限自由度问题变为离散的有限自由度问题。有限元分析法对于处理耦合场问题有更独到的优势，在以压电材料作为主要研究对象的压电声学换能器以及智能材料研究领域，有限元法快速发展成一种新型实用的研究机电耦合效应的数值处理方法。本文在研究压电有限元模型在压电换能器和智能结构研究与应用文献的基础上，运用压电有限元模型对压电加速度计性能进行仿真分析，给出了利用有限元仿真软件ANSYS的建模步骤和计算方法，对压电有限元分析方法在压电加速度计技术指标仿真的应用进行了深入研究。构建了压电加速度计的有限元模型。通过对三角剪切结构，压缩式结构和平面剪切结构压电加速度计的仿真与实验研究，用数值仿真结果与标定数据进行了比对分析，仿真结果与实际标定数据有良好的一致性，验证了有限元仿真在压电传感器的研发中的可行性和有效性。尤其是对压电加速度计频率特性的分析与预测，达到了准确的数值化水平，仿真误差均小于10%。对典型结构压电加速度计的结构和结构元件以及压电元件性能参数因素进行了仿真研究，分析了压电结构的应力分布、电荷分布、谐振特性，有限元模型可以为压电加速度计设计指标给出定性和定量的仿真结果。压电结构有限元模型能对压电加速度计的设计性能进行更准确的预测，对技术指标进行更细致的仿真，并且仿真结果完全实现可视化，证明有限元法可以作为解决机械应力和应变‐电场耦合问题的强有力工具，可以成为压电加速度计的快速和柔性化设计手段，对压电加速度计研究与设计和技术指标优化具有较大的实用价值。更多还原

【Abstract】 On the basis of full investigation on R & D status of piezoelectric accelerometer, thefinite element models of the typical structure of the piezoelectric accelerometer isestablished. Through simulation and experimental research, it shows that finite elementsimulation is valid and effective in piezoelectric sensor.The piezoelectric element of an accelerometers converts the stress generated byvibration into charge output. The Generally piezoelectric accelerometers have beenusing analytical model to research the single degrees of freedom spring-mass system. Thecoefficient of elasticity of the piezoelectric material and positive piezoelectric effectparameters to evaluate piezoelectric accelerometer sensitivity and frequency responsecharacteristics. The analytical and combined analytical-experimental methods are used todesign piezoelectric accelerometer and modify its specification.The finite element method(FEM) is an efficient, accuracy and economical method forstructure design. Based on the theory of elastic mechanics and variational andinterpolation principle , the contiguous region in the real model can be discretized intogroups of finite elements using technique, The FE analysis for the coupled field problem ismore sophisticated. FEM have become a new practical numerical simulation in the field ofacoustics and smart structure research.Forward electromechanical coupling piezoelectricity finite element model wasproposed to simulate the performance of piezoelectricity accelerometer and then FEM forpiezoelectric accelerometer is constructed. Modeling procedure and the calculationmethod is given in accordance with the finite element simulation software ANSYS, andexploratory study is making to the finite element analysis method which applys to thesimulation of technical indicators in the piezoelectric accelerometer. Compare numericalsimulation results with the measured data indicate that verify the practicality andeffectiveness of the finite element model of the piezoelectric accelerometer.Simulative and experimental research is accomplished for Delta shear mode,compressive mode and planar shear mode accelerometer respectively. The numerical simulation result and calibration data is compared and study. Good agreement is achievedbetween simulated results and calibration. It is proved that the FE modeling can beeffectively used to predict the specifications of the accelerometer. Especilly to evaluateand anlysis the frequency characteristics of piezoelectric accelerometer, its numericalresult can reach the exact level, the all simulation error is less than 10%.Simulative study of typical sensor structure and metal material property, piezoelectricparameter is made in the dissertation. The resonance modes, stresses and chargedistributing of piezoelectric structures are analysed. The FE model can give the results ofqualitative and quantitative analysis for the specification of the accelerometer.Accurate finite element computer model provides a powerful assistant for traditionalmethods. The finite element method gives more accurate forecasts to the designperformance of the piezoelectric accelerometers, and more detailed simulation tospecification, the simulation results are visualized entirely. It is proved that the FEM canbe effectively used to resolve the problem of electromechanical coupling field.The FEdeveloping technology forms the bases of fast responsiveness and flexible design ofpiezoelectric accelerometers. This study has great practical value to the piezoelectricaccelerometer design and the optimization specification.更多还原