【作者】 乔广达；

【导师】 程廷海； 姚丙南；

【作者基本信息】 长春工业大学 ， 工程硕士（专业学位）， 2022， 硕士

【摘要】 压电粘滑驱动器具有毫秒内的快速响应、纳米级的定位精度、结构简单、断电自锁、不受电磁干扰等优点,已成为精密驱动领域的主流技术之一。然而,滑阶段的摩擦力会使驱动器的性能严重劣化,导致位移回退、速度波动等瓶颈问题。为解决上述问题,本文提出了惯性块辅助式压电粘滑驱动器的设计思想。利用惯性块在非对称激励下产生不同的惯性,从而动态地改变定子与动子之间的正压力以实现摩擦力的动态调控;在滑阶段驱动足可以产生远离动子的偏转,进而消除正压力,使作用在动子上摩擦力的冲量几乎为零,实现了压电粘滑驱动器的平顺驱动。首先,本文阐述了压电粘滑驱动基础理论,包括对压电效应、压电材料的发展以及压电堆叠的组成进行了介绍;同时,对压电粘滑驱动的工作原理进行了分析。此外,概述了柔性铰链的分类,并介绍了直圆、直梁型柔性铰链的计算方法。其次,提出了旋转型与直线型惯性块辅助式压电粘滑驱动器,并对驱动器的工作原理进行了分析。采用伪刚体法建立了驱动器动力学模型,并推导出定子与动子之间正压力与压电元件在非对称激励下的数学表达式,揭示了惯性块辅助式压电粘滑平顺驱动实现机理。继而对定子进行了有限元仿真分析以指导结构的参数化设计,基于MATLAB/Simulink搭建了考虑正压力动态变化的动力学模型,仿真得到了从位移回退到位移突进的单步位移特性,验证了设计方案的可行性。最后,研制了旋转型及直线型惯性块辅助式压电粘滑平顺驱动器样机并搭建了实验系统,实验研究表明,所研制的旋转及直线型驱动器位移曲线的线性拟合相关系数R²均可达到0.9999。其中,旋转型驱动器在2.0 kg负载下的位移曲线仍表现出良好的平顺性,R²为0.9998;在100 V_P-P,700 Hz的激励下,驱动器的速度为231320μrad/s;分辨力为1.56μrad。直线型驱动器的最大速度为101.76 mm/s;即使在低电压(5 V_p-p)和低频率（10 Hz）下,R²也可以达到0.9991;此外,驱动器在PID闭环控制系统下可实现27 nm的定位精度。本文提出了正压力动态调节的设计思想;通过将惯性块与柔性铰链机构进行解耦,研制了直线型与旋转型驱动器,仅通过激励单个压电元件实现了压电粘滑驱动器在低电压、低频、高频、重载不同工况下的平顺驱动。更多还原

【Abstract】 Piezoelectric stick-slip actuators have the advantages of fast response within milliseconds,nano-nanometer positioning accuracy,simple structure,self-locking when power off,immunity to electromagnetic interference,etc.,which have become one of the mainstream technologies in the field of precision drive.However,the friction in the slip stage will seriously deteriorate the performance of the actuators,resulting in bottleneck problems such as backward motion and velocity fluctuation.To overcome the above problem,the design idea of piezoelectric stick-slip actuators assisted by the inertial block is proposed in this paper.Using the inertia block to generate different inertias under asymmetric excitation,it can dynamically change the normal pressure between the stator and mover to realize the dynamic regulation of friction;during the slip stage,the driving foot produces a deflection away from the mover,thereby eliminating the normal pressure,so that the impulse of the friction on the mover can be almost reduced to zero,and the smooth motion of the piezoelectric stick-slip actuator can be realized.Firstly,the basic theory of piezoelectric stick-slip actuators is expounded in this paper,including the introduction of the piezoelectric effect,the development of piezoelectric materials,and the composition of the piezoelectric stacks;at the same time,the working principle of piezoelectric stick-slip actuators is analyzed.Additionally,the classification of flexure hinges is summarized,and the calculation methods of the right circular and the straight beam flexure hinges are introduced.Secondly,the rotary and linear piezoelectric stick-slip actuators assisted by the inertial block are proposed,and the working principles of the actuators are analyzed.The pseudo-rigid body method is used to establish the dynamic model of two actuators,and the mathematical expression of the normal pressure between the stator and the slider and the piezoelectric element under asymmetric excitation is deduced,which reveals the mechanism of piezoelectric stick-slip smooth driving assisted by the inertial block.Then,the finite element simulation analysis of the stator is carried out to guide the parametric design of the structure,a dynamic model considering the dynamic change of the normal pressure is built based on MATLAB/Simulink,and the single-step displacement characteristics from the backward motion to displacement surge are simulated,which verifies the feasibility of the designed scheme.Finally,the prototypes of the rotary and linear piezoelectric stick-slip actuators assisted by the inertial block are developed,the corresponding test systems are built,and the output characteristics of the actuators are experimentally studied.The linear fitting correlation coefficient R² of the displacement curves of the developed rotary and linear actuators both can reach 0.9999.Among them,the displacement curve of the rotary actuator still has good smoothness under a load of 2.0 kg,with an R² of 0.9998;under the excitation of 100 V_P-Pand 700 Hz,the velocity of the actuator was 231320μrad/s;the resolution is 1.56μrad.For the linear actuator,the maximum velocity is 101.76 mm/s;even at low voltage(5 V_p-p)and low frequency（10 Hz）,R² can reach 0.9991;in addition,the positioning accuracy of the actuator can achieve 27 nm under a PID closed-loop control system.In this paper,the design scheme of dynamic adjustment of the normal pressure is proposed;the linear and the rotary actuators are proposed by decoupling the inertia block and the flexure hinge mechanism,which realize the smooth driving under different working conditions of low voltage,low frequency,high frequency and heavy load for piezoelectric stick-slip actuators excited by only a piezoelectric element.更多还原