【摘要】 热电转换效率直接影响热电式MEMS微波功率传感器的性能。着重对衬底掏空结构的热电式微波功率传感器进行了研究。将热电式微波功率传感器分成三个区域,建立了傅里叶模型,研究背面刻蚀的长度与厚度对热电堆热端温度的影响,发现热电堆两端温差与背面刻蚀的长度、厚度成正比。利用有限元仿真软件ANSYS,对不同刻蚀长度、厚度的传感器进行热学仿真。结果表明,背面刻蚀尺寸越大,热电堆两端的温差越大,传感器的灵敏度得到提高。仿真结果与模型结果具有较高的一致性,验证了模型的准确性。更多还原

【Abstract】 The performance of the thermoelectric MEMS microwave power sensor is affected by thermoelectric conversion efficiency. The research of thermoelectric microwave power sensor with a back etching substrate was focused on. By dividing the thermoelectric microwave power sensor into three regions, the Fourier model was established to study the influence of the length and thickness of the back etching substrate on the hot end temperature of the thermopile. Besides, the sensors of different etching sizes were simulated by finite element simulation software ANSYS. It was found that the larger the back etching size, the larger the temperature difference between the two ends of the thermopile. The results were consistent with that of the Fourier model, verifying the accuracy of the model. Therefore, the sensitivity of the sensor could be improved by increasing the etching size.更多还原