【摘要】 从SiC晶棒切割工艺需求与技术特点出发，对比分析了激光冷分离技术的应用优势，详细介绍了激光冷分离技术研制过程中的关键技术和难点技术，最后对该技术未来发展趋势进行了展望。更多还原

【Abstract】 Based on the requirements and technical characteristics of SiC ingot cutting process,the application advantages of laser cold split technology are compared and analyzed. The key technologies and the difficult technologies in the development of laser cold split technology are introduced in detail. Finally,the future development trend of this technology is prospected.更多还原