【摘要】 SnO₂作为典型的n型金属氧化物半导体，具有优异的物化稳定性和灵敏度，在还原性气体传感方面具有极好的表现。通过静电纺丝法和煅烧工艺在600℃下制备了纯SnO₂纳米纤维和（0.5%、1%、2%、3%、4%（原子分数））In掺杂SnO₂纳米纤维。通过测试In掺杂SnO₂气体传感器对氢气的气体响应，研究其气体传感性能，证明了In掺杂SnO₂纳米纤维在气体传感方面具有潜在应用价值。在340℃时，1%（原子分数）的In掺杂SnO₂纳米纤维对100×10^-6氢气具有最高的响应（S=6.4）并且具有极快的响应/恢复行为（3.6 s/4.5 s）和高氢气选择性。结合FESEM、TEM、XRD、XPS分别对SnO₂基纳米纤维的微观形貌以及尺寸，晶体结构以及元素组成进行了分析表征，以阐释验证其传感机理，并讨论了一种合理的传感机制。更多还原

【Abstract】 As a typical n-type metal oxide semiconductor, tin dioxide has excellent physicochemical stability and sensitivity, and has excellent performance in reducing gas sensing. Pure SnO₂ nanofibers and（0.5at%, 1at%, 2at%, 3at% and 4at%） In doped SnO₂ nanofibers were prepared by electrospinning and calcination at 600 ℃. By testing the gas response of In doped SnO₂ gas sensors to hydrogen and studying their gas sensing performance, it has been proven that In doped SnO₂ nanofibers have potential application value in gas sensing. At 340 ℃, 1at% In doped SnO₂ nanofibers have the highest response to 100×10^-6 hydrogen（S=6.4） and have extremely fast response/recovery behavior（3.6 s/4.5 s） and high hydrogen selectivity. The micromorphology, crystal size, crystal structure, and elemental composition of SnO₂ based nanofibers were analyzed and characterized by combining with FESEM, TEM, XRD, and XPS to explain and verify their sensing mechanism, and a reasonable sensing mechanism was discussed.更多还原