【作者】 王瑜；

【导师】 张广秋； 葛袁静；

【作者基本信息】 北京印刷学院 ， 材料物理与化学， 2005， 硕士

【摘要】 本论文探讨了利用射频等离子体化学气相沉积(RF-PECVD)技术在金属表面制备类金刚石(Diamond-like Carbon, 简称DLC)膜制备。对所制备的DLC膜采用拉曼光谱(Raman)、傅立叶红外透射光谱(FTIR)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、划痕仪、摩擦磨损仪、纳米压痕仪等方法进行了性能测量研究。研究结果表明:采用射频等离子体化学气相沉积方法,可以在金属表面沉积一定厚度的DLC膜,但是由于薄膜与基材之间存在较大的内应力,薄膜牢度较小,易剥落,且不耐磨。当结合电子束蒸发镀/磁控溅射的方法,在金属表面制备Ti/TiN过渡层,然后再用射频等离子体化学气相沉积的方法在过渡层上制备DLC膜,发现制备的DLC膜的附着牢度和耐磨性大大提高了。拉曼光谱、傅立叶红外透射光谱、纳米压痕仪测试表明,随甲烷含量的变化,DLC膜的成分结构及性质都有所变化,含sp3杂化较多的DLC膜的硬度比较大。实验同时发现沉积速度随着反应压强的升高先快后慢。更多还原

【Abstract】 In this thesis, Diamond-like Carbon (DLC) films on metal surface were deposited by radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD). The properties of films were detected by Raman spectroscopy, FTIR, XPS, SEM, AFM, scratch test, friction test, and indentation test. The results show that the DLC film can be deposited on metals by RF plasma. The deposition rate increased with the deposition time but decreasing in extended period. Due to the initial force between film and substrates, the adhesion of DLC film on substrates has a problem. Films are cracked and peeled off easily from the substrates. Besides that the films are not wearability. To solve such problem Ti and TiN gradient layers are prepared by electron beam evaporated deposition and magnetron controlled sputtering method before DLC film deposition. The results indicate that adhesion and the wearability of DLC films are significantly increased. Through analysis of Raman spectroscopy, FTIR, and measurement of indentation test, it notices that the ratio of methane in the deposition plays important role in DLC structure and properties where the more sp3 concentration the harder film.更多还原