【作者】 娄小伟；

【导师】 檀慧明；

【作者基本信息】 中国科学院研究生院(长春光学精密机械与物理研究所) ， 光学工程， 2014， 硕士

【摘要】 微纳米量级的微环谐振腔型传感芯片，基于倏逝波原理，以其特有的微环谐振腔的增强效应，能实现极高的灵敏度，而且无需对检测物质进行标记。目前的微环谐振腔常利用绝缘体上硅(silicon on insulator，SOI)材料，该材料具有良好的导光性质，折射率差大，并且与成熟的互补金属氧化物半导体(complementary metal oxide semiconductor，CMOS)工艺兼容，加工工艺成熟。基于平面光波导的微环谐振腔型芯片，极易实现与微流控芯片的系统集成，容易进行化学表面处理。本论文主要对眼型谐振腔结构的输出谱线的尖锐度大小进行了分析，眼型谐振腔由一个外环和内环构成，外环与总线波导耦合，内环与外环耦合。谐振峰、谷处的尖锐程度对微环传感器的分辨率具有重要意义，在相同的光谱仪器下，尖锐度大的具有更高的探测限，获得较大的谐振峰的尖锐度，有利于提高传感器的灵敏度。利用传输矩阵法对眼型谐振腔下路端输出光谱进行了数值计算，在不同剩余电场比例系数下，改变外环与总线波导间的场强耦合系数和内环与外环之间的场强耦合系数，非对称Fano谐振峰的尖锐度随电场剩余比例系数的增大而增大，发现其尖锐度的最大值随外环和内环场强耦合系数变化缓慢增大，尖锐度最大值处谐振点传输系数值在不同电场剩余比例系数和内外环场强耦合系数下稳定在-6dB附近。-6dB对于传感具有重要意义，较高的传输系数易于分辨，且不易被干扰。因此利用眼型谐振腔结构下路端的Fano谐振峰，可获得对耦合系数不敏感的尖锐度和谐振点传输系数，降低器件对耦合区加工精度的要求。在工艺损耗和耦合系数给定的情况下，分析了眼型谐振腔内环和外环的周长对最大尖锐度的变化影响，发现在外环周长一定的情况下，通过减小内环能够获得的最大尖锐度的改变量是微小的，内环越小，最大尖锐度两侧的变化越平缓，这表明在工艺损耗、内环场强耦合系数确定的情况下，对于如何获得最大尖锐度，外环和内环的周长有多种选择，可根据不同版图需要，设计不同的周长，对器件的设计提供了便利。主要工作内容有以下几个部分：1.为了提升微环传感器的灵敏度，本论文分别对眼型谐振腔结构下路端产生的Fano谐振峰的尖锐度和单环下路端输出谱线的尖锐度变化情况作了对比分析，并详细分析了关键参数对尖锐度的影响情况。2.分析了光学微环谐振腔的传感机制和传感测试方案以及对应的灵敏度表达方式，并分析了影响灵敏度的因素。利用硅基光波导微环谐振腔进行了免疫磁珠的传感测试实验。更多还原

【Abstract】 Microring resonator sensors, which are based on evanescent wave theory andhave unique microring resonator enhancement, can achieve high sensitivity,moreover target molecules are not need to be labeled. Now microring resonator ismanufactured by silicon on insulator, the silicon on insulator has good lightpropagation and refractive index difference, the crafts of silicon on insulator iscompatible with mature complementary metal oxide semiconductor(CMOS). Themicroring resonator is based on planar waveguide, which can not only treat chemicalsurface modifications easily, but also can integrate with microfluidic system easily.In this paper, the sharpness with the drop port spectra of eye-like resonator areanalyzed in detail, the Eye-like resonator consists two rings resonators with the outerloop coupled to two bus waveguides and the inner loop couple to the outer loop. thesharpness with resonance peak and valley has great significance for microringresonator sensor resolution, in the same spectral instruments, the greater sharpnessmeans a higher detection limit, for microring resonator sensors, obtaining a greatersharpness can enhance the sensitivity of the microring sensor. Numerical calculationof spectrum on the drop port is utilized by the transfer matrix method, as the roundtrip loss varies, changing the outer loop and inner loop coupling coefficient, thevalue of sharpness increases with the round trip loss, however, the maximum valueof sharpness of Fano-resonance change slowly in the round trip loss varies and alager range of the outer loop and inner loop coupling coefficient, as the round trip loss and the outer loop and inner loop coupling coefficient varies, the correspondingtransmission at the resonant point remains almost unchanged, about-6dB. Thesharpness of Fano resonant peak is insensitive for the coupling coefficients, whichcan reduce the requirements of manufacture of coupling region. As loss and couplingcoefficient is given, the outer perimeter is also given, the maximum of sharpness canbe obtained by reducing the inner ring, the amount of change is small, the smallerinner perimeter, the more gradual change on both sides of the maximum of sharpness,which indicates that in the case of loss and coupling coefficient is determined, theouter and inner perimeter has many options, according to different layout needs,designing different perimeter, so this is convenient for designing eye-like resonator,the main contents are listed as follows:1. In this paper, key parameters of the sharpness with the drop port spectra ofeye-like resonator are analyzed in detail, moreover, compared with the single-ringresonator.2. We analyze the sensing mechanism and sensor schemes measuring withoptical microring resonator and the corresponding sensitivity of expression, andanalyzes the factors that affect the sensitivity. We test immune beads by using opticalwaveguide microring resonator.更多还原