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一种新的相位测量轮廓术
A Novel Phase Measuring Profilometry
【摘要】 首次提出了变精度二次测量轮廓术,利用这一技术,在相位恢复过程中,对有断点及边界区域也能得到正确的去包裹相位值。文中讨论了相位恢复的误差容限。最后,把这一技术用于三维面形测量中,并得到了较好的实验结果。
【Abstract】 A new method is presented to acquire 3D profile of an object by measuring theobject twice. This technique can produce a correct unwrapping in the presence ofdiscontinuites in the process of Phase restoring. We introduce it into the measurement of a3D object shape and obtain satistactory experimental results.
【关键词】 三维轮廓术;
变精度二次测量;
相移;
【Key words】 three-dimensional profilometry; two step measurement; phase shift.;
【Key words】 three-dimensional profilometry; two step measurement; phase shift.;
- 【文献出处】 光学学报 ,ACTA OPTICA SINICA , 编辑部邮箱 ,1995年07期
- 【分类号】O438
- 【被引频次】30
- 【下载频次】241